Received for review October 26, 2007. Accepted November 30, 2007.

Abstract:

We have previously reported on a maskless photolithography device for surface micropatterning and microfabrication by modifying a commercially available liquid crystal display projector. For the prototype, 10-m resolution was achieved by downsizing the image on a 0.7-in. liquid crystal display panel to an area of 8 × 6 mm and projecting it on a fixed stage. Here, we report on a second-generation maskless photolithography device having two novel features. First, the sliding lens system with variable focal distances and exchangeable objective lenses achieves a variable resolution of 2-8 m. Second, the synchronous control of displayed images generated by a personal computer and the movement of a XY-positioning stage allows for the fabrication of micropatterns over a larger area (over 50 × 50 mm). Here, we show examples fabricated with the two novel features.

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