Chem. Mater., 20 (3), 607614, 2008. 10.1021/cm071784j
Web Release Date: December 15, 2007

Copyright © 2008 American Chemical Society

Patterning Techniques for Mesostructured Films

Plinio Innocenzi,* Tongjit Kidchob, Paolo Falcaro,§ and Masahide Takahashi

DAP, Laboratorio di Scienza dei Materiali e Nanotecnologie, CR-INSTM and Nanoworld Institute, Università di Sassari, Palazzo Pou Salid, Piazza Duomo 6, 07041 Alghero (Sassari), Italy, and Associazione CIVENNano Fabrication Facility, Via delle Industrie 9, 30175 Marghera, Venezia, Italy

Received July 6, 2007

Revised Manuscript Received October 30, 2007

Abstract:

Patterning mesostructured films is becoming an important area of research for its technological implications. Self-assembled mesoporous materials synthesized through templating of nano-objects offer, in fact, the possibility of hosting active organic molecules or nanoparticles, and several applications in photonics and microelectronics are now emerging. At the same time, new “unconventional” lithographic techniques are also available to design nano- or microscale patterned mesoporous structures. We discuss the recent developments of lithographic methods for patterning mesoporous materials; some applications and future trends are also envisaged in the present review.

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