Web Release Date: August 23,
Integrated Microreactor System for Gas-Phase Catalytic Reactions. 1. Scale-up Microreactor Design and Fabrication
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
Department of Electrical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
DuPont Company, Central Research & Development, Experimental Station, Wilmington, Delaware 19880-0304
Received for review January 16, 2007
Revised manuscript received May 1, 2007
Accepted May 3, 2007
Abstract:
The design and fabrication of a gas-phase microreactor that is based upon a multilayer laminate microelectronics
structure is described. The reactor is a key component in an integrated system whose platform utilizes a
commercial computer chassis with modular boards to perform the required process functions. The design
combines knowledge from earlier laminate microstructures with new prototyping concepts for incorporation
of various on-board devices. A 3-D finite element simulation model was used to identify various design
improvements. The final device contains two parallel reaction channels on a chiplike die in which a 1 
m
platinum film catalyst is deposited on the underside of a silicon nitride membrane. Seven platinum heaters
and temperature sensors are evenly distributed along the top side of the silicon nitride membrane. Electrical
contacts for the on-board control and sensing devices are achieved through various pins that are distributed
around the reactor die. The experience and knowledge gained in developing the final reactor device is utilized
in Part 2 of this series for reactor packaging and development of the integrated system modules.
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