Web Release Date: March 27,
Ultralong Single-Crystal Metallic Ni2Si Nanowires with Low Resistivity
Department of Chemistry, University of Wisconsin-Madison, Madison, Wisconsin 53706
Received December 29, 2006
Revised March 1, 2007

Abstract:
Ultralong, single-crystal Ni2Si nanowires sheathed with amorphous silicon oxide were synthesized on a large scale by a chemical vapor
transport (CVT) method, using iodine as the transport reagent and Ni2Si powder as the source material. Structural characterization using
powder X-ray diffraction, electron microscopy, and energy-dispersive spectroscopy shows that the nanowires have Ni2Si-SiOx core-shell
structure with single-crystal Ni2Si core and amorphous silicon oxide shell. The oxide shell is electrically insulating and can be removed by HF
etching. Four-terminal electrical measurements show that the single-crystal nanowire has extremely low resistivity of 21 
·cm and is capable
of supporting remarkably high failure current density >108 A/cm2. These unique Ni2Si nanowires are very attractive nanoscale building blocks
for interconnects and fully silicided (FUSI) gate applications in nanoelectronics.
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