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Hands-on Classroom Photolithography Laboratory Module To Explore Nanotechnology

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Scott J. Stelick and William H. Alger

Alliance for Nanomedical Technologies, Cornell University, Ithaca, NY 14850

Jesse S. Laufer , Anna M. Waldron and Carl A. Batt

Nanobiotechnology Center, Cornell University, Ithaca, NY 14850

J. Chem. Educ., 2005, 82 (9), p 1361

DOI: 10.1021/ed082p1361

Publication Date (Web): September 1, 2005

Section:

History, Education, and Documentation

Abstract

Teaching nanotechnology in the high school and undergraduate environment is a challenge given the typical expense of instruments used to create micro- and nano-sized devices. To meet this challenge, a portable optical reduction stepper was designed, fabricated, and optimized for use in classrooms. This unique system was designed to provide a safe, hands-on experience for students to create microscale circuits using photolithography. Students are able to design, fabricate, and test a circuit with dimensions as small as 100 mm. The hands-on activity involves the use of a portable 5X optical reduction stepper that is able to transfer a pattern created on a simple acetate transparency to an aluminum coated slide. The etched aluminum features in the pattern can be tested by virtue of their ability to complete a circuit. The entire activity can be accomplished in 1–3 hours and all steps and reagents are designed to be carried out in a typical classroom laboratory environment. The teaching activity highlights important concepts in chemistry, optics, electricity, and engineering and used in a pilot study with students ages 12–14 years helped to convey key concepts in nanotechnology.

Keywords (Audience):

High School / Introductory Chemistry

Keywords (Domain):

Curriculum

Keywords (Pedagogy):

Hands-On Learning / Manipulatives

Keywords (Subject):

Applications of Chemistry

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