Cart
Article
Chemistry of Electronic Gases
Hi-Res PDFPurchase the full-text
- PDF/HTML,
figures/images,
references and tables,
(where available)
Abstract
The chemistry of electronic gases is reviewed, and their use as relevant examples of practical chemistry in the classroom is discussed. Electronic gases can be defined as those gases used in manufacturing by the electronics (i.e., semiconductor) industry. They are generally specialty gases used in relatively low volumes and high purity for specific applications. They are used in many different processes in the electronics industry, but the four most common applications are deposition and doping, etching, special atmospheres, and cleaning. The chemistry of electronic gases can be used in the classroom to provide many interesting examples of molecular structures, chemical reactions, periodic trends, and environmental chemistry.
Keywords (Audience):
First-Year Undergraduate / GeneralKeywords (Domain):
Chemical EngineeringKeywords (Feature):
Products of ChemistryKeywords (Pedagogy):
Textbooks / Reference BooksKeywords (Subject):
Applications of ChemistryTools
-
Add to Favorites
-
Download Citation
-
Email a Colleague -
Permalink
Order Reprints
Rights & Permissions
Citation Alerts
History
- Received: August 03, 2009
ACS
Network
Facebook
Tweet This
CiteULike
Newsvine
Digg This
Delicious
