Three-Dimensional Nanostructure Construction via Nanografting:  Positive and Negative Pattern Transfer

Jun-Fu Liu, Sylvain Cruchon-Dupeyrat, Jayne C. Garno, Jane Frommer,§ and Gang-Yu Liu*
Department of Chemistry, University of California, Davis, California 95616, Department of Chemistry, Wayne State University, Detroit, Michigan 48202, IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120
Nano Letters, 2002, 2 (9), pp 937–940
DOI: 10.1021/nl025670c
Publication Date (Web): August 24, 2002
Copyright © 2002 American Chemical Society

 University of California, Davis.

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 Current address:  NanoInk, Inc., 1436 W. Randolph St. #402, Chicago, IL 60607.

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 Wayne State University.

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 IBM Almaden Research Center.

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 Corresponding author. Tel:  530-754-9678; Fax:  530-752-8995; E-mail:  liu@chem.ucdavis.edu.

Abstract

Abstract Image

Three-dimensional nanostructures can be constructed using scanning probe lithography in combination with selective surface reactions. This letter introduces a successful approach using AFM-based nanografting to produce two-dimensional nanopatterns within self-assembled monolayer resists. These nanopatterns serve as an anchor to construct nanostructures in the third dimension via surface reactions. In this way, the nanometer-scale 2D pattern is transferred to chemically distinct 3D nanostructures. This approach offers the advantages of high spatial precision and selectivity in pattern transfer.

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History

  • Published In Issue September 11, 2002
  • Received June 25, 2002
    Revised Manuscript Received August 1, 2002

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