Letter
Three-Dimensional Nanostructure Construction via Nanografting: Positive and Negative Pattern Transfer
University of California, Davis.
Current address: NanoInk, Inc., 1436 W. Randolph St. #402, Chicago, IL 60607.
Wayne State University.
IBM Almaden Research Center.
Corresponding author. Tel: 530-754-9678; Fax: 530-752-8995; E-mail: liu@chem.ucdavis.edu.
Abstract

Three-dimensional nanostructures can be constructed using scanning probe lithography in combination with selective surface reactions. This letter introduces a successful approach using AFM-based nanografting to produce two-dimensional nanopatterns within self-assembled monolayer resists. These nanopatterns serve as an anchor to construct nanostructures in the third dimension via surface reactions. In this way, the nanometer-scale 2D pattern is transferred to chemically distinct 3D nanostructures. This approach offers the advantages of high spatial precision and selectivity in pattern transfer.
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History
- Published In Issue September 11, 2002
- Received June 25, 2002
Revised Manuscript Received August 1, 2002
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