Letter
Local Gating of Carbon Nanotubes
Corresponding author.
Abstract

Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo “finger gates” (
150 nm × 10 nm). Prior to tube growth, several finger gates were patterned lithographically and subsequently coated with a patterned high-κ dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have an effect that is distinct from that of a global backgate.
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History
- Published In Issue January 14, 2004
- Received August 24, 2003
Revised Manuscript Received October 30, 2003
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