Local Gating of Carbon Nanotubes

M. J. Biercuk, N. Mason, and C. M. Marcus*
Department of Physics, Harvard University, Cambridge, Massachusetts 02138
Nano Letters, 2004, 4 (1), pp 1–4
DOI: 10.1021/nl034696g
Publication Date (Web): November 19, 2003
Copyright © 2004 American Chemical Society
*

 Corresponding author.

Abstract

Abstract Image

Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo “finger gates” (150 nm × 10 nm). Prior to tube growth, several finger gates were patterned lithographically and subsequently coated with a patterned high-κ dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have an effect that is distinct from that of a global backgate.

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History

  • Published In Issue January 14, 2004
  • Received August 24, 2003
    Revised Manuscript Received October 30, 2003

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