Self-Sensing Micro- and Nanocantilevers with Attonewton-Scale Force Resolution

J. L. Arlett, J. R. Maloney, B. Gudlewski, M. Muluneh, and M. L. Roukes*
Kavli Nanoscience Institute and Departments of Physics, Applied Physics, and Bioengineering, California Institute of Technology, 114-36, Pasadena, California 91125
Nano Lett., 2006, 6 (5), pp 1000–1006
DOI: 10.1021/nl060275y
Publication Date (Web): April 18, 2006
Copyright © 2006 American Chemical Society
*

 Corresponding author:  roukes@caltech.edu.

Abstract

Abstract Image

Thin, piezoresistive silicon cantilevers are shown to provide unprecedented sensitivity for force detection in an integrated, self-sensing, readily scalable configuration. The devices realized herein are patterned from single-crystal Si epilayer membranes utilizing bulk micro- and nanomachining processes. We demonstrate an electrically transduced force sensitivity of 235 aN/Hz1/2 at room temperature and 17 aN/Hz1/2 at 10 K. Enhancement of the p+ piezoresistive gauge factor is observed at cryogenic temperatures. The results are employed to elucidate the ultimate, low-temperature sensitivity attainable from self-sensing nanoelectromechanical systems utilizing displacement transduction based upon semiconducting piezoresistors.

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History

  • Published In Issue May 10, 2006
  • Received February 6, 2006
    Revised Manuscript Received March 9, 2006

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