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Letter

Sub-10 nm Device Fabrication in a Transmission Electron Microscope

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Michael D. Fischbein and Marija Drndić*

Department of Physics and Astronomy, University of Pennsylvania, 209 South 33rd Street, Philadelphia, Pennsylvania 19104

Nano Lett., 2007, 7 (5), pp 1329–1337

DOI: 10.1021/nl0703626

Publication Date (Web): April 17, 2007

Abstract

We show that a high-resolution transmission electron microscope can be used to fabricate metal nanostructures and devices on insulating membranes by nanosculpting metal films. Fabricated devices include nanogaps, nanodiscs, nanorings, nanochannels, and nanowires with tailored curvatures and multi-terminal nanogap devices with nanoislands or nanoholes between the terminals. The high resolution, geometrical flexibility, and yield make this fabrication method attractive for many applications including nanoelectronics and nanofluidics.

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