Sub-10 nm Device Fabrication in a Transmission Electron Microscope

Michael D. Fischbein and Marija Drndić*
Department of Physics and Astronomy, University of Pennsylvania, 209 South 33rd Street, Philadelphia, Pennsylvania 19104
Nano Lett., 2007, 7 (5), pp 1329–1337
DOI: 10.1021/nl0703626
Publication Date (Web): April 17, 2007
Copyright © 2007 American Chemical Society
*

 Corresponding author. E-mail:  drndic@physics.upenn.edu.

Abstract

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We show that a high-resolution transmission electron microscope can be used to fabricate metal nanostructures and devices on insulating membranes by nanosculpting metal films. Fabricated devices include nanogaps, nanodiscs, nanorings, nanochannels, and nanowires with tailored curvatures and multi-terminal nanogap devices with nanoislands or nanoholes between the terminals. The high resolution, geometrical flexibility, and yield make this fabrication method attractive for many applications including nanoelectronics and nanofluidics.

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History

  • Published In Issue May 09, 2007
  • Received February 14, 2007
    Revised Manuscript Received March 26, 2007

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