Table 2. Choosing a Technique for the Determination of Copper in an Electroplating Bath
| Criteria |
|
Flame AAS |
|
Single-
Element
GFAAS |
|
Multi-
element
GFAAS |
|
Radial/Axial
ICP-OES |
|
ICP-MS |
| Detection limits |
|
 |
|
|
|
|
|
|
|
|
| Accuracy/precision |
|
|
|
|
|
|
|
|
|
|
| Concentration range |
|
|
|
|
|
|
|
|
|
|
| Sample volume |
|
|
|
|
|
|
|
|
|
|
| Elements per sample |
|
|
|
|
|
|
|
|
|
|
| Sample throughput |
|
|
|
|
|
|
|
|
|
|
| Operator expertise |
|
|
|
|
|
|
|
|
|
|
| Purchase price |
|
|
|
|
|
|
|
|
|
|
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