Electron Beam Patterning of Metal–Organic Frameworks
- Yurun MiaoYurun MiaoInstitute for NanoBioTechnology, Johns Hopkins University, 3400 North Charles St, Baltimore, Maryland 21218, United StatesMore by Yurun Miao
- and
- Michael Tsapatsis*Michael Tsapatsis*Email: [email protected]Institute for NanoBioTechnology, Johns Hopkins University, 3400 North Charles St, Baltimore, Maryland 21218, United StatesDepartment of Chemical and Biomolecular Engineering, Johns Hopkins University, 3400 North Charles St, Baltimore, Maryland 21218, United StatesApplied Physics Laboratory, Johns Hopkins University, 11100 Johns Hopkins Road, Laurel, Maryland 20723, United StatesMore by Michael Tsapatsis
Abstract
Development in patterning technique of metal–organic frameworks (MOFs) will facilitate their integration in microelectronics, but controlling the structure of MOFs at the nanoscale remains a major challenge. We demonstrate that an electron beam (e-beam) can be used to pattern a zinc-imidazolate MOF, ZIF-L, at unprecedented resolution in a direct-write lithographic approach, where the electron-irradiated MOF functions either as a positive- or negative-tone resist depending on the level of exposure and developing solvent used. Nanosheets with adjustable thickness and other nanostructures can be obtained using a low e-beam with a controlled penetration depth. In addition, electron irradiation in ZIF-L leads to spatially directed crystallization to a prototypical MOF ZIF-8 via ligand-vapor treatment. This versatile strategy opens the door to e-beam-based processing of MOF materials for various applications.
Cited By
This article is cited by 12 publications.
- Yake Wang, Jinping Chen, Yi Zeng, Tianjun Yu, Shuangqing Wang, Xudong Guo, Rui Hu, Peng Tian, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci, Yanqing Wu, Shumin Yang, Jun Zhao, Guoqiang Yang, Yi Li. Nonchemically Amplified Molecular Resists Based on Sulfonium-Functionalized Sulfone Derivatives for Sub-13 nm Nanolithography. ACS Applied Nano Materials 2023, Article ASAP.
- Takashi Ito, Samantha G. Jenkins, Soenke Seifert, Ahmet Uysal. Electrochemistry-Induced Direct Deposition of Nanoscale Thin Zeolitic Imidazolate Framework-8 Films on Insulator Substrates. Crystal Growth & Design 2023, 23 (9) , 6369-6377. https://doi.org/10.1021/acs.cgd.3c00329
- Yake Wang, Jundi Yuan, Jinping Chen, Yi Zeng, Tianjun Yu, Xudong Guo, Shuangqing Wang, Guoqiang Yang, Yi Li. A Single-Component Molecular Glass Resist Based on Tetraphenylsilane Derivatives for Electron Beam Lithography. ACS Omega 2023, 8 (13) , 12173-12182. https://doi.org/10.1021/acsomega.2c08112
- Paul Iacomi, Guillaume Maurin. ResponZIF Structures: Zeolitic Imidazolate Frameworks as Stimuli-Responsive Materials. ACS Applied Materials & Interfaces 2021, 13 (43) , 50602-50642. https://doi.org/10.1021/acsami.1c12403
- Supriya Ghosh, Hwanhui Yun, Prashant Kumar, Sabrina Conrad, Michael Tsapatsis, K. Andre Mkhoyan. Two Distinct Stages of Structural Modification of ZIF-L MOF under Electron-Beam Irradiation. Chemistry of Materials 2021, 33 (14) , 5681-5689. https://doi.org/10.1021/acs.chemmater.1c01332
- Rong Wu, Ming Luo, Lifei Liu, Lei Liu, Weizhen Zhao, Wen‐Hua Sun. Structural investigation of zinc‐based photoresists with different substituents for high‐resolution lithography. Applied Organometallic Chemistry 2023, 37 (8) https://doi.org/10.1002/aoc.7158
- Yurun Miao, Dennis T. Lee, Matheus Dorneles de Mello, Mueed Ahmad, Mohammed K. Abdel-Rahman, Patrick M. Eckhert, J. Anibal Boscoboinik, D. Howard Fairbrother, Michael Tsapatsis. Solvent-free bottom-up patterning of zeolitic imidazolate frameworks. Nature Communications 2022, 13 (1) https://doi.org/10.1038/s41467-022-28050-z
- Junchang Chen, Mingxing Zhang, Shitong Zhang, Kecheng Cao, Xuanzhi Mao, Maojiang Zhang, Linwei He, Xiao Dong, Jie Shu, Hongchun Dong, Fuwan Zhai, Rongfang Shen, Mengjia Yuan, Xiaofang Zhao, Guozhong Wu, Zhifang Chai, Shuao Wang. Metal‐Organic Framework@Metal Oxide Heterostructures Induced by Electron‐Beam Radiation. Angewandte Chemie 2022, 134 (47) https://doi.org/10.1002/ange.202212532
- Junchang Chen, Mingxing Zhang, Shitong Zhang, Kecheng Cao, Xuanzhi Mao, Maojiang Zhang, Linwei He, Xiao Dong, Jie Shu, Hongchun Dong, Fuwan Zhai, Rongfang Shen, Mengjia Yuan, Xiaofang Zhao, Guozhong Wu, Zhifang Chai, Shuao Wang. Metal‐Organic Framework@Metal Oxide Heterostructures Induced by Electron‐Beam Radiation. Angewandte Chemie International Edition 2022, 61 (47) https://doi.org/10.1002/anie.202212532
- Benzheng Xia, Aleksander Matavž, Min Tu, Víctor Rubio‐Giménez, Max Lutz Tietze, João Marreiros, Frederik Ceyssens, Charlotte Cresens, Nathalie Wauteraerts, Alexey Kubarev, Michael Kraft, Rob Ameloot. Single‐Crystal Capacitive Sensors with Micropatterned Electrodes via Space‐Confined Growth of the Metal–Organic Framework HKUST‐1. Advanced Functional Materials 2022, 32 (36) https://doi.org/10.1002/adfm.202204065
- Artem K. Grebenko, Konstantin A. Motovilov, Anton V. Bubis, Albert G. Nasibulin. Gentle Patterning Approaches toward Compatibility with Bio‐Organic Materials and Their Environmental Aspects. Small 2022, 18 (22) https://doi.org/10.1002/smll.202200476
- Shunhe Tang, Chuying Yu, Xinxin Liu, Danchen Fu, Wentao Liao, Feng Xu, Wenbin Zhong. 2-Methylimidazole assisted synthesis of nanocrystalline shell reinforced PPy hydrogel with high mechanical and electrochemical performance. Chemical Engineering Journal 2022, 430 , 133033. https://doi.org/10.1016/j.cej.2021.133033