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Nondestructive Femtosecond Laser Lithography of Ni Nanocavities by Controlled Thermo-Mechanical Spallation at the Nanoscale

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    Nondestructive Femtosecond Laser Lithography of Ni Nanocavities by Controlled Thermo-Mechanical Spallation at the Nanoscale
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    • Vasily V. Temnov*
      Vasily V. Temnov
      ITMO University, 197101 St. Petersburg, Russia
      IMMM CNRS 6283, Le Mans Université, 72085 Le Mans, France
      *Email: [email protected]
      More by Vasily V. Temnov
      Orcidhttp://orcid.org/0000-0003-2708-5916
    • Alexandr Alekhin
      Alexandr Alekhin
      IMMM CNRS 6283, Le Mans Université, 72085 Le Mans, France
      CIC nanoGUNE BRTA, E-20018 Donostia-San Sebastian, Spain
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    • Andrey Samokhvalov
      Andrey Samokhvalov
      ITMO University, 197101 St. Petersburg, Russia
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    • Dmitry S. Ivanov
      Dmitry S. Ivanov
      ITMO University, 197101 St. Petersburg, Russia
      Department of Physics and OPTIMAS Research Center, Technical University of Kaiserslautern, 67663 Kaiserslautern, Germany
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    • Alexey Lomonosov
      Alexey Lomonosov
      Prokhorov General Physics Institute of the Russian Academy of Sciences, Vavilova str. 38, 119991 Moscow, Russia
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    • Paolo Vavassori
      Paolo Vavassori
      CIC nanoGUNE BRTA, E-20018 Donostia-San Sebastian, Spain
      IKERBASQUE, Basque Foundation for Science, E-48013 Bilbao, Spain
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      Orcidhttp://orcid.org/0000-0002-4735-6640
    • Evgeny Modin
      Evgeny Modin
      CIC nanoGUNE BRTA, E-20018 Donostia-San Sebastian, Spain
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      Orcidhttp://orcid.org/0000-0002-7403-7610
    • Vadim P. Veiko
      Vadim P. Veiko
      ITMO University, 197101 St. Petersburg, Russia
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    Other Access OptionsSupporting Information (1)

    Nano Letters

    Cite this: Nano Lett. 2020, 20, 11, 7912–7918
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    https://doi.org/10.1021/acs.nanolett.0c02574
    Published October 19, 2020
    Copyright © 2020 American Chemical Society
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    Abstract

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    We present a new approach to femtosecond direct laser writing lithography to pattern nanocavities in ferromagnetic thin films. To demonstrate the concept, we irradiated 300 nm thin nickel films by single intense femtosecond laser pulses through glass substrate. Using a fluence above the ablation threshold, the process is destructive, leading to the formation of an ablation crater. By progressively lowering the laser fluence, the formation of closed spallation cavities below the ablation threshold is achieved. Systematic studies by the electron and optical interferometric microscopies, supported by molecular dynamics simulations, enabled us to gain an understanding of the thermo-mechanical spallation mechanism at the solid–molten interface. We achieved the fabrication of periodic arrangements of closed spallation nanocavities. Due to their topology, closed magnetic nanocavities can support unique couplings of multiple excitations (magnetic, optical, acoustic, spintronic). Thereby, they offer a unique physics playground for emerging fields in magnetism, magneto-photonic, and magneto-acoustic applications.

    Copyright © 2020 American Chemical Society

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    Supporting Information

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acs.nanolett.0c02574.

    • Fs-laser damage and spallation structures on 100 nm thin nickel films; focused ion beam milling and scanning electron microscopy of closed spallation cavities; magneto-optical properties of spallation flakes and closed cavities; acoustic vibrations of isolated spallation cavities (theory and experiment); molecular dynamics simulations of fs-laser and ps-laser thermo-mechanical spallation of nickel thin films; and the role of laser focusing and polarization (PDF)

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    Cited By

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    This article is cited by 11 publications.

    1. Hideki Fujiwara, Seigo Daikokuya, Tatsuki Mirokuin, Kyohei Hayashi, Mizuki Matsuzaka, Yuri Ohashi, Christophe Pin, Hideo Kaiju, Kenji Hirai, Hiroshi Uji-i. Site-Specific Synthesis of Conductive Graphitic Nanomaterials on a NiFe Thin Film by Localized Laser Irradiation. ACS Applied Nano Materials 2023, 6 (15) , 13885-13893. https://doi.org/10.1021/acsanm.3c01272
    2. Yong Pan, Li Wang, Xueqiong Su, Dongwen Gao, Peng Cheng. Nanolasers Incorporating CoxGa0.6–xZnSe0.4 Nanoparticle Arrays with Wavelength Tunability at Room Temperature. ACS Applied Materials & Interfaces 2021, 13 (5) , 6975-6986. https://doi.org/10.1021/acsami.1c00035
    3. Pavel Varlamov, Akira Barros, Aditya Swaminathan, Alexey Lomonosov, Michele Raynaud, Vasily V. Temnov. Grazing incidence nanogap resonance in the prism-gap-ferromagnet magneto-plasmonic Otto configuration. Optics Letters 2025, 50 (1) , 109. https://doi.org/10.1364/OL.543060
    4. Pavel Varlamov, Jan Marx, Yoav Urbina Elgueta, Andreas Ostendorf, Ji-Wan Kim, Paolo Vavassori, Vasily Temnov. Femtosecond Laser Ablation and Delamination of Functional Magnetic Multilayers at the Nanoscale. Nanomaterials 2024, 14 (18) , 1488. https://doi.org/10.3390/nano14181488
    5. Stoffel D. Janssens, David Vázquez-Cortés, Burhannudin Sutisna, Eliot Fried. Direct femtosecond laser writing of nanochannels by carbon allotrope transformation. Carbon 2023, 215 , 118455. https://doi.org/10.1016/j.carbon.2023.118455
    6. Vinod Parmar, Sonu Singh, Arvind Singh, Sunil Kumar, Dinesh Kalyanasundaram. Hybrid thermo-physical modelling and experimentation of ultrafast laser-based fabrication of polycrystalline core–amorphous shell nitinol nanoparticles. Optics & Laser Technology 2023, 165 , 109575. https://doi.org/10.1016/j.optlastec.2023.109575
    7. Antonia Ghita, Tudor-Gabriel Mocioi, Urban Vernik, Alexey M. Lomonosov, Jiwan Kim, Paolo Vavassori, Vasily V. Temnov, , , . Resonant phonon-magnon interactions in freestanding metal-ferromagnet multilayers acting as acoustic cavities. 2023, 8. https://doi.org/10.1117/12.2682306
    8. Ye Qiu, Haibo Yu, Xiaoduo Wang, Yuzhao Zhang, Jianchen Zheng, Jingang Wang, Quan Gan, Lianqing Liu, Wen Jung Li. Investigation on Cell Orientation Induced by Various Femtosecond Laser Ablated Microstructures. 2023, 343-348. https://doi.org/10.1109/NANO58406.2023.10231195
    9. Pavel Varlamov, Anna Semisalova, Anh Dung Nguyen, Michael Farle, Yannis Laplace, Michele Raynaud, Olivier Noel, Paolo Vavassori, Vasily Temnov. Femtosecond Laser Ablation-Induced Magnetic Phase Transformations in FeRh Thin Films. Magnetochemistry 2023, 9 (7) , 186. https://doi.org/10.3390/magnetochemistry9070186
    10. Urban Vernik, Alexey M. Lomonosov, Vladimir S. Vlasov, Leonid N. Kotov, Dmitry A. Kuzmin, Igor V. Bychkov, Paolo Vavassori, Vasily V. Temnov. Resonant phonon-magnon interactions in freestanding metal-ferromagnet multilayer structures. Physical Review B 2022, 106 (14) https://doi.org/10.1103/PhysRevB.106.144420
    11. Denys Makarov, Oleksii M. Volkov, Attila Kákay, Oleksandr V. Pylypovskyi, Barbora Budinská, Oleksandr V. Dobrovolskiy. New Dimension in Magnetism and Superconductivity: 3D and Curvilinear Nanoarchitectures. Advanced Materials 2022, 34 (3) https://doi.org/10.1002/adma.202101758
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    Nano Letters

    Cite this: Nano Lett. 2020, 20, 11, 7912–7918
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acs.nanolett.0c02574
    Published October 19, 2020
    Copyright © 2020 American Chemical Society
    Request reuse permissions

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