Scalable and Deterministic Fabrication of Quantum Emitter Arrays from Hexagonal Boron NitrideClick to copy article linkArticle link copied!
- Chi LiChi LiSchool of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaMore by Chi Li
- Noah MendelsonNoah MendelsonSchool of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaMore by Noah Mendelson
- Ritika RitikaRitika RitikaSchool of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaMore by Ritika Ritika
- YongLiang ChenYongLiang ChenSchool of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaMore by YongLiang Chen
- Zai-Quan XuZai-Quan XuSchool of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaMore by Zai-Quan Xu
- Milos TothMilos TothSchool of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaMore by Milos Toth
- Igor Aharonovich*Igor Aharonovich*Email: [email protected]School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, AustraliaMore by Igor Aharonovich
Abstract

We demonstrate the fabrication of large-scale arrays of single-photon emitters (SPEs) in hexagonal boron nitride (hBN). Bottom-up growth of hBN onto nanoscale arrays of dielectric pillars yields corresponding arrays of hBN emitters at the pillar sites. Statistical analysis shows that the pillar diameter is critical for isolating single defects, and diameters of ∼250 nm produce a near-unity yield of a single emitter at each pillar site. Our results constitute a promising route toward spatially controlled generation of hBN SPEs and provide an effective and efficient method to create large-scale SPE arrays. The results pave the way to scalability and high throughput fabrication of SPEs for advanced quantum photonic applications.
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