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Flexible but Refractory Single-Crystalline Hyperbolic Metamaterials

  • Ruyi Zhang*
    Ruyi Zhang
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
    *[email protected]
    More by Ruyi Zhang
  • Ting Lin
    Ting Lin
    Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
    More by Ting Lin
  • Shaoqin Peng
    Shaoqin Peng
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
    More by Shaoqin Peng
  • Jiachang Bi
    Jiachang Bi
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
    More by Jiachang Bi
  • Shunda Zhang
    Shunda Zhang
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
    More by Shunda Zhang
  • Guanhua Su
    Guanhua Su
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
    More by Guanhua Su
  • Jie Sun
    Jie Sun
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    More by Jie Sun
  • Junhua Gao
    Junhua Gao
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    More by Junhua Gao
  • Hongtao Cao
    Hongtao Cao
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    More by Hongtao Cao
  • Qinghua Zhang*
    Qinghua Zhang
    Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
    *[email protected]
  • Lin Gu
    Lin Gu
    Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
    More by Lin Gu
  • , and 
  • Yanwei Cao*
    Yanwei Cao
    Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
    *[email protected]
    More by Yanwei Cao
Cite this: Nano Lett. 2023, 23, 9, 3879–3886
Publication Date (Web):April 28, 2023
https://doi.org/10.1021/acs.nanolett.3c00512
Copyright © 2023 American Chemical Society

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    Abstract

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    The fabrication of flexible single-crystalline plasmonic or photonic components in a scalable way is fundamentally important to flexible electronic and photonic devices with high speed, high energy efficiency, and high reliability. However, it remains a challenge. Here, we have successfully synthesized flexible single-crystalline optical hyperbolic metamaterials by directly depositing refractory nitride superlattices on flexible fluorophlogopite-mica substrates with magnetron sputtering. Interestingly, these flexible hyperbolic metamaterials show dual-band hyperbolic dispersion of dielectric constants with small dielectric losses and high figures of merit in the visible to near-infrared ranges. More importantly, the optical properties of these nitride-based flexible hyperbolic metamaterials show remarkable stability during 1000 °C heating or after being bent 1000 times. Therefore, the strategy developed in this work offers an easy and scalable route for fabricating flexible, high-performance, and refractory plasmonic or photonic components, which can significantly expand the applications of current electronic and photonic devices.

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acs.nanolett.3c00512.

    • Experimental details, wide-range 2θ–ω scans, φ scans, and reciprocal space mapping for TiN/ScN SL on F-mica (001), photo image, structural and optical properties for TiN/ScN SL on a 2 in. Al2O3 (0001) wafer, optical properties of F-mica and ScN films, fitting details of SE data, UV–vis–NIR transmittance, STEM images of SLs after they had been repeatedly bent, and SE data for thermal stability and flexibility tests (PDF)

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