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Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography

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    Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography
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    † Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138, United States
    ‡ Wyss Institute for Biologically Inspired Engineering, Harvard University, 60 Oxford Street, Cambridge, Massachusetts 02138, United States
    § Kavli Institute for Bionano Science and Technology, Harvard University, 29 Oxford Street, Cambridge, Massachusetts 02138, United States
    *E-mail: [email protected]
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    Nano Letters

    Cite this: Nano Lett. 2016, 16, 7, 4125–4132
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    https://doi.org/10.1021/acs.nanolett.6b00952
    Published May 31, 2016
    Copyright © 2016 American Chemical Society
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    Abstract

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    This paper describes a strategy that uses template-directed self-assembly of micrometer-scale microspheres to fabricate arrays of microlenses for projection photolithography of periodic, quasiperiodic, and aperiodic infrared metasurfaces. This method of “template-encoded microlens projection lithography” (TEMPL) enables rapid prototyping of planar, multiscale patterns of similarly shaped structures with critical dimensions down to ∼400 nm. Each of these structures is defined by local projection lithography with a single microsphere acting as a lens. This paper explores the use of TEMPL for the fabrication of a broad range of two-dimensional lattices with varying types of nonperiodic spatial distribution. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior.

    Copyright © 2016 American Chemical Society

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    • Background information, experimental details, analytical description of the spherical aberration, and SEM images of additional samples.(PDF)

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    Nano Letters

    Cite this: Nano Lett. 2016, 16, 7, 4125–4132
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acs.nanolett.6b00952
    Published May 31, 2016
    Copyright © 2016 American Chemical Society
    Request reuse permissions

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