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    High Quality Factor Graphene-Based Two-Dimensional Heterostructure Mechanical Resonator
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    † JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
    ‡ School of Physics and Astronomy and Manchester Centre for Mesoscience and Nanotechnology, University of Manchester, Oxford Road, Manchester M13 9PL, United Kingdom
    § ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology, 08860 Castelldefels, Barcelona, Spain
    ∥ Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52425 Jülich, Germany
    *E-mail: [email protected]
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    Nano Letters

    Cite this: Nano Lett. 2017, 17, 10, 5950–5955
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    https://doi.org/10.1021/acs.nanolett.7b01845
    Published September 14, 2017
    Copyright © 2017 American Chemical Society
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    Abstract

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    Ultralight mechanical resonators based on low-dimensional materials are well suited as exceptional transducers of minuscule forces or mass changes. However, the low dimensionality also provides a challenge to minimize resistive losses and heating. Here, we report on a novel approach that aims to combine different two-dimensional (2D) materials to tackle this challenge. We fabricated a heterostructure mechanical resonator consisting of few layers of niobium diselenide (NbSe2) encapsulated by two graphene sheets. The hybrid membrane shows high quality factors up to 245,000 at low temperatures, comparable to the best few-layer graphene mechanical resonators. In contrast to few-layer graphene resonators, the device shows reduced electrical losses attributed to the lower resistivity of the NbSe2 layer. The peculiar low-temperature dependence of the intrinsic quality factor points to dissipation over two-level systems which in turn relax over the electronic system. Our high sensitivity readout is enabled by coupling the membrane to a superconducting cavity which allows for the integration of the hybrid mechanical resonator as a sensitive and low loss transducer in future quantum circuits.

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    The Supporting Information is available free of charge on the ACS Publications website at DOI: 10.1021/acs.nanolett.7b01845.

    • Membrane characterization by Raman, calculation of resonator amplitude, data on temperature-dependent dissipation in additional devices, effect of thermal expansion on resonance frequency, and dependence of dissipation on mechanical drive voltage (PDF)

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    Cite this: Nano Lett. 2017, 17, 10, 5950–5955
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    https://doi.org/10.1021/acs.nanolett.7b01845
    Published September 14, 2017
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