Asymmetrically Substituted Tetrahedral Cobalt NHC Complexes and Their Use as ALD as well as Low-Temperature CVD PrecursorsClick to copy article linkArticle link copied!
- Katharina LubitzKatharina LubitzInstitut für Anorganische Chemie, Julius-Maximilians-Universität Würzburg, Am Hubland, 97074 Würzburg, GermanyMore by Katharina Lubitz
- Varun SharmaVarun SharmaInstitut für Halbleiter- und Mikrosystemtechnik, Technische Universität Dresden, Helmholtzstrasse 10, 01069 Dresden, GermanyMore by Varun Sharma
- Shashank ShuklaShashank ShuklaInstitut für Halbleiter- und Mikrosystemtechnik, Technische Universität Dresden, Helmholtzstrasse 10, 01069 Dresden, GermanyMore by Shashank Shukla
- Johannes H. J. BerthelJohannes H. J. BerthelInstitut für Anorganische Chemie, Julius-Maximilians-Universität Würzburg, Am Hubland, 97074 Würzburg, GermanyMore by Johannes H. J. Berthel
- Heidi SchneiderHeidi SchneiderInstitut für Anorganische Chemie, Julius-Maximilians-Universität Würzburg, Am Hubland, 97074 Würzburg, GermanyMore by Heidi Schneider
- Christoph Hoßbach*Christoph Hoßbach*E-mail for C.H.: [email protected]Institut für Halbleiter- und Mikrosystemtechnik, Technische Universität Dresden, Helmholtzstrasse 10, 01069 Dresden, GermanyMore by Christoph Hoßbach
- Udo Radius*Udo Radius*E-mail for U.R.: [email protected]Institut für Anorganische Chemie, Julius-Maximilians-Universität Würzburg, Am Hubland, 97074 Würzburg, GermanyMore by Udo Radius
Abstract
The synthesis of novel asymmetrically substituted cobalt complexes of the type [Co(CO)(NO)(NHC)(PR3)] (NHC = iPr2Im, PR3 = PMe3 (1), PEt3(2), PHiPr2 (3); PR3 = PMe3;, NHC = Me2ImMe (4), MeiPrIm (5), MetBuIm (6), iPr2ImMe (7); R2Im = 1,3-dialkylimidazolin-2-ylidene) is reported. These complexes are stabilized by N-heterocyclic carbene (NHC), phosphine, carbonyl, and nitrosyl ligands and have been synthesized from the reaction of a NHC-substituted precursor of the type [Co(CO)2(NO)(NHC)] and the corresponding phosphine. The synthesis of [Co(CO)(NO)(MetBuIm)(PMe3)] (6) and [Co(CO)(NO)(iPr2ImMe)(PMe3)] (7) proceeds in a thermal reaction even at room temperature by quantitative replacement of one carbonyl with a phosphine ligand. All of the other complexes were synthesized using photochemical conditions. Complexes 1–6 have been characterized by elemental analysis, IR spectroscopy, and multinuclear NMR spectroscopy and in some cases by X-ray crystallography. All complexes are volatile, are stable upon sublimation, and decompose readily in a stepwise manner at elevated temperature. The complex [Co(CO)(NO)(iPr2Im)(PMe3)] (1) as well as cobalt complexes that were reported earlier, i.e. [Co(CO)(NO)(iPr2Im)2], [Co(CO)(NO)(MetBuIm)2], and [Co(CO)2(NO)(iPr2Im)], are evaluated and have been successfully applied in the deposition of cobalt-based thin films.
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