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Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications
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    Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications
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    • Wedyan Babatain
      Wedyan Babatain
      MMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
    • Sumana Bhattacharjee
      Sumana Bhattacharjee
      MMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
      Center for VLSI and Embedded Systems Technology (CVEST), International Institute of Information Technology (IIIT), Hyderabad, Telangana 500032, India
    • Aftab M. Hussain
      Aftab M. Hussain
      Center for VLSI and Embedded Systems Technology (CVEST), International Institute of Information Technology (IIIT), Hyderabad, Telangana 500032, India
    • Muhammad Mustafa Hussain*
      Muhammad Mustafa Hussain
      MMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
      Department of Electrical Engineering and Computer Sciences (EECS), University of California, Berkeley, California 94720, United States
      *Email: [email protected]; [email protected]. Tel.: +966-544-700-072. Website: http://mmhlabs.org.
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    ACS Applied Electronic Materials

    Cite this: ACS Appl. Electron. Mater. 2021, 3, 2, 504–531
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    https://doi.org/10.1021/acsaelm.0c00746
    Published January 15, 2021
    Copyright © 2021 American Chemical Society

    Abstract

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    Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers’ sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

    Copyright © 2021 American Chemical Society

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    ACS Applied Electronic Materials

    Cite this: ACS Appl. Electron. Mater. 2021, 3, 2, 504–531
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsaelm.0c00746
    Published January 15, 2021
    Copyright © 2021 American Chemical Society

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