Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and ApplicationsClick to copy article linkArticle link copied!
- Wedyan BabatainWedyan BabatainMMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaMore by Wedyan Babatain
- Sumana BhattacharjeeSumana BhattacharjeeMMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaCenter for VLSI and Embedded Systems Technology (CVEST), International Institute of Information Technology (IIIT), Hyderabad, Telangana 500032, IndiaMore by Sumana Bhattacharjee
- Aftab M. HussainAftab M. HussainCenter for VLSI and Embedded Systems Technology (CVEST), International Institute of Information Technology (IIIT), Hyderabad, Telangana 500032, IndiaMore by Aftab M. Hussain
- Muhammad Mustafa Hussain*Muhammad Mustafa Hussain*Email: [email protected]; [email protected]. Tel.: +966-544-700-072. Website: http://mmhlabs.org.MMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaDepartment of Electrical Engineering and Computer Sciences (EECS), University of California, Berkeley, California 94720, United StatesMore by Muhammad Mustafa Hussain
Abstract

Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers’ sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.
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