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Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor

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Download Hi-Res ImageDownload to MS-PowerPointCite This:ACS Appl. Mater. Interfaces 2020, 12, 19, 21641-21650
    Research Article

    Atomic Layer Deposition of Sodium Phosphorus Oxynitride: A Conformal Solid-State Sodium-Ion Conductor
    Click to copy article linkArticle link copied!

    • R. Blake Nuwayhid
      R. Blake Nuwayhid
      Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States
      More by R. Blake Nuwayhid
      Orcidhttp://orcid.org/0000-0001-5251-7800
    • Angelique Jarry
      Angelique Jarry
      Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States
      More by Angelique Jarry
      Orcidhttp://orcid.org/0000-0002-5410-8020
    • Gary W. Rubloff
      Gary W. Rubloff
      Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States
      Institute for Systems Research and the Institute for Research in Electronics and Applied Physics, University of Maryland, Collage Park, Maryland 20742, United States
      More by Gary W. Rubloff
    • Keith E. Gregorczyk*
      Keith E. Gregorczyk
      Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States
      *E-mail: [email protected]
      More by Keith E. Gregorczyk
      Orcidhttp://orcid.org/0000-0002-7323-281X
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    ACS Applied Materials & Interfaces

    Cite this: ACS Appl. Mater. Interfaces 2020, 12, 19, 21641–21650
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    https://doi.org/10.1021/acsami.0c03578
    Published April 21, 2020
    Copyright © 2020 American Chemical Society
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    Abstract

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    The development of novel materials that are compatible with nanostructured architectures is required to meet the demands of next-generation energy-storage technologies. Atomic layer deposition (ALD) allows for the precise synthesis of new materials that can conformally coat complex 3D structures. In this work, we demonstrate a thermal ALD process for sodium phosphorus oxynitride (NaPON), a thin-film solid-state electrolyte (SSE), for sodium-ion batteries (SIBs). NaPON is analogous to the commonly used lithium phosphorus oxynitride SSE in lithium-ion batteries. The ALD process produces a conformal film with a stoichiometry of Na4PO3N, corresponding to a sodium polyphosphazene structure. The electrochemical properties of NaPON are characterized to evaluate its potential in SIBs. The NaPON film exhibited a high ionic conductivity of 1.0 × 10–7 S/cm at 25 °C and up to 2.5 × 10–6 S/cm at 80 °C, with an activation energy of 0.53 eV. In addition, the ionic conductivity is comparable and even higher than the ionic conductivities of ALD-fabricated Li+ conductors. This promising result makes NaPON a viable SSE or passivation layer in solid-state SIBs.

    Copyright © 2020 American Chemical Society

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    Supporting Information

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsami.0c03578.

    • Diagram of the custom UHV cluster tool described in the main text, high-resolution C 1s XPS spectra of NaPON, error analysis of the EIS measurements, XRD and AFM characterization of NaPON, and images of Pt/NaPON/Pt thin-film stacks for electrochemical testing (PDF)

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    Cited By

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    This article is cited by 17 publications.

    1. R. Blake Nuwayhid, Alexander C. Kozen, Daniel M. Long, Kunal Ahuja, Gary W. Rubloff, Keith E. Gregorczyk. Dynamic Electrode–Electrolyte Intermixing in Solid-State Sodium Nano-Batteries. ACS Applied Materials & Interfaces 2023, 15 (20) , 24271-24283. https://doi.org/10.1021/acsami.2c23256
    2. Madison Olson, Steven Kmiec, Steve W. Martin. NaPON Doping of Na4P2S7 Glass and Its Effects on the Structure and Properties of Mixed Oxy-Sulfide-Nitride Phosphate Glass. Inorganic Chemistry 2022, 61 (44) , 17469-17484. https://doi.org/10.1021/acs.inorgchem.2c02300
    3. Milad Madadi, Juho Heiska, Jenna Multia, Maarit Karppinen. Atomic and Molecular Layer Deposition of Alkali Metal Based Thin Films. ACS Applied Materials & Interfaces 2021, 13 (48) , 56793-56811. https://doi.org/10.1021/acsami.1c17519
    4. Jed D. LaCoste, Andriy Zakutayev, Ling Fei. A Review on Lithium Phosphorus Oxynitride. The Journal of Physical Chemistry C 2021, 125 (7) , 3651-3667. https://doi.org/10.1021/acs.jpcc.0c10001
    5. Sambhaji S. Shinde, Nayantara K. Wagh, Sung‐Hae Kim, Jung‐Ho Lee. Li, Na, K, Mg, Zn, Al, and Ca Anode Interface Chemistries Developed by Solid‐State Electrolytes. Advanced Science 2023, 10 (32) https://doi.org/10.1002/advs.202304235
    6. Kunal Ahuja, Valentin Sallaz, Ramsay Blake Nuwayhid, Frederic Voiron, Patrick McCluskey, Gary W. Rubloff, Keith E. Gregorczyk. Ultra-thin on-chip ALD LiPON capacitors for high frequency application. Journal of Power Sources 2023, 575 , 233056. https://doi.org/10.1016/j.jpowsour.2023.233056
    7. Daniela Fontecha, R. Blake Nuwayhid, Alexander C. Kozen, David M. Stewart, Gary W. Rubloff, Keith E. Gregorczyk. Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content. Journal of Vacuum Science & Technology A 2022, 40 (3) https://doi.org/10.1116/6.0001752
    8. Lowie Henderick, Arpan Dhara, Andreas Werbrouck, Jolien Dendooven, Christophe Detavernier. Atomic layer deposition of metal phosphates. Applied Physics Reviews 2022, 9 (1) https://doi.org/10.1063/5.0069647
    9. R. Blake Nuwayhid, Daniela Fontecha, Alexander C. Kozen, Angelique Jarry, Sang Bok Lee, Gary W. Rubloff, Keith E. Gregorczyk. Nanoscale Li, Na, and K ion-conducting polyphosphazenes by atomic layer deposition. Dalton Transactions 2022, 51 (5) , 2068-2082. https://doi.org/10.1039/D1DT03736F
    10. Bikesh Gupta, Md. Anower Hossain, Asim Riaz, Astha Sharma, Doudou Zhang, Hark Hoe Tan, Chennupati Jagadish, Kylie Catchpole, Bram Hoex, Siva Karuturi. Recent Advances in Materials Design Using Atomic Layer Deposition for Energy Applications. Advanced Functional Materials 2022, 32 (3) https://doi.org/10.1002/adfm.202109105
    11. Kunal Ahuja, Valentin Sallaz, Ramsay Blake Nuwayhid, Frederic Voiron, Patrick McCluskey, Gary W. Rubloff, Keith E. Gregorczyk. Ultra-Thin On-Chip Ald Lipon Capacitors for High Frequency Application. SSRN Electronic Journal 2022, 2 https://doi.org/10.2139/ssrn.4182174
    12. Robert Usiskin, Yaxiang Lu, Jelena Popovic, Markas Law, Palani Balaya, Yong-Sheng Hu, Joachim Maier. Fundamentals, status and promise of sodium-based batteries. Nature Reviews Materials 2021, 6 (11) , 1020-1035. https://doi.org/10.1038/s41578-021-00324-w
    13. Zhaodong Li, Jingjie Su, Xudong Wang. Atomic layer deposition in the development of supercapacitor and lithium-ion battery devices. Carbon 2021, 179 , 299-326. https://doi.org/10.1016/j.carbon.2021.03.041
    14. Tripurari Sharan Tripathi, Maarit Karppinen. Mixed‐Anion Compounds: An Unexplored Playground for ALD Fabrication. Advanced Materials Interfaces 2021, 8 (11) https://doi.org/10.1002/admi.202100146
    15. Triratna Muneshwar, Doug Barlage, Ken Cadien. Stoichiometry controlled homogeneous ternary oxide growth in showerhead atomic layer deposition reactor and application for ZrxHf1−xO2. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 2021, 39 (3) https://doi.org/10.1116/6.0000856
    16. Yang Zhao, Lei Zhang, Jian Liu, Keegan Adair, Feipeng Zhao, Yipeng Sun, Tianpin Wu, Xuanxuan Bi, Khalil Amine, Jun Lu, Xueliang Sun. Atomic/molecular layer deposition for energy storage and conversion. Chemical Society Reviews 2021, 50 (6) , 3889-3956. https://doi.org/10.1039/D0CS00156B
    17. Jelena Popovic. Nanostructured alkali and alkaline earth metal interfaces for high-energy batteries. 2021, 327-359. https://doi.org/10.1016/B978-0-12-821434-3.00007-7
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    ACS Applied Materials & Interfaces

    Cite this: ACS Appl. Mater. Interfaces 2020, 12, 19, 21641–21650
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsami.0c03578
    Published April 21, 2020
    Copyright © 2020 American Chemical Society
    Request reuse permissions

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