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RETURN TO ISSUEPREVFunctional Nanostruc...Functional Nanostructured Materials (including low-D carbon)NEXT

Single-Layer MoS2 Mechanical Resonant Piezo-Sensors with High Mass Sensitivity

  • Chengming Jiang*
    Chengming Jiang
    Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
    *Email: [email protected]
  • Qikun Li*
    Qikun Li
    Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
    *Email: [email protected]
    More by Qikun Li
  • Jijie Huang
    Jijie Huang
    School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
    More by Jijie Huang
  • Sheng Bi
    Sheng Bi
    Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
    More by Sheng Bi
  • Ruonan Ji
    Ruonan Ji
    Department of Physics, Northwestern Polytechnical University, Xi’an 710072, China
    More by Ruonan Ji
  • , and 
  • Qinglei Guo
    Qinglei Guo
    Department of Material Science and Engineering, Frederick Seitz Material Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States
    More by Qinglei Guo
Cite this: ACS Appl. Mater. Interfaces 2020, 12, 37, 41991–41998
Publication Date (Web):August 19, 2020
Copyright © 2020 American Chemical Society

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    Abstract Image

    Thin-film resonators and scanning probe microscopies (SPM) are usually used on low-frequency mechanical systems at the nanoscale or larger. Generally, off-chip approaches are applied to detect mechanical vibrations in these systems, but these methods are not much appropriate for atomic-thin-layer devices with ultrahigh characteristic frequencies and ultrathin thickness. Primarily, those mechanical devices based on atomic-layers provide highly improved properties, which are inapproachable with conventional nanoelectromechanical systems (NEMS). In this report, the assembly and manipulation of single-atomic-layer piezo-resonators as mass sensors with eigen mechanical resonances up to gigahertz are described. The resonators utilize electronic vibration transducers based on piezo-electric polarization charges, allowing direct and optimal atomic-layer sensor exports. This direct detection affords practical applications with the previously inapproachable Q-factor and sensitivity rather than photoelectric conversion. Exploration of a 2406.26 MHz membrane vibration is indicated with a thermo-noise-limited mass resolution of ∼3.0 zg (10–21 g) in room temperature. The fabricated mass sensors are contactless and fast and can afford a method for precision measurements of the ultrasmall mass with two-dimentional materials.

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    • Crystallographic orientation experiment, piezopotential in single-layer MoS2, nonlinear analysis for the resonant shifts, and frequency analysis for MoS2 mass sensor (PDF)

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