Pair your accounts.

Export articles to Mendeley

Get article recommendations from ACS based on references in your Mendeley library.

Pair your accounts.

Export articles to Mendeley

Get article recommendations from ACS based on references in your Mendeley library.

You’ve supercharged your research process with ACS and Mendeley!

STEP 1:
Click to create an ACS ID

Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

MENDELEY PAIRING EXPIRED
Your Mendeley pairing has expired. Please reconnect
ACS Publications. Most Trusted. Most Cited. Most Read
My Activity
CONTENT TYPES

Figure 1Loading Img
RETURN TO ISSUEPREVFunctional Nanostruc...Functional Nanostructured Materials (including low-D carbon)NEXT

Single-Layer MoS2 Mechanical Resonant Piezo-Sensors with High Mass Sensitivity

  • Chengming Jiang*
    Chengming Jiang
    Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
    *Email: [email protected]
  • Qikun Li*
    Qikun Li
    Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
    *Email: [email protected]
    More by Qikun Li
  • Jijie Huang
    Jijie Huang
    School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, United States
    More by Jijie Huang
  • Sheng Bi
    Sheng Bi
    Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
    More by Sheng Bi
  • Ruonan Ji
    Ruonan Ji
    Department of Physics, Northwestern Polytechnical University, Xi’an 710072, China
    More by Ruonan Ji
  • , and 
  • Qinglei Guo
    Qinglei Guo
    Department of Material Science and Engineering, Frederick Seitz Material Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States
    More by Qinglei Guo
Cite this: ACS Appl. Mater. Interfaces 2020, 12, 37, 41991–41998
Publication Date (Web):August 19, 2020
https://doi.org/10.1021/acsami.0c11913
Copyright © 2020 American Chemical Society

    Article Views

    1958

    Altmetric

    -

    Citations

    LEARN ABOUT THESE METRICS
    Other access options
    Supporting Info (1)»

    Abstract

    Abstract Image

    Thin-film resonators and scanning probe microscopies (SPM) are usually used on low-frequency mechanical systems at the nanoscale or larger. Generally, off-chip approaches are applied to detect mechanical vibrations in these systems, but these methods are not much appropriate for atomic-thin-layer devices with ultrahigh characteristic frequencies and ultrathin thickness. Primarily, those mechanical devices based on atomic-layers provide highly improved properties, which are inapproachable with conventional nanoelectromechanical systems (NEMS). In this report, the assembly and manipulation of single-atomic-layer piezo-resonators as mass sensors with eigen mechanical resonances up to gigahertz are described. The resonators utilize electronic vibration transducers based on piezo-electric polarization charges, allowing direct and optimal atomic-layer sensor exports. This direct detection affords practical applications with the previously inapproachable Q-factor and sensitivity rather than photoelectric conversion. Exploration of a 2406.26 MHz membrane vibration is indicated with a thermo-noise-limited mass resolution of ∼3.0 zg (10–21 g) in room temperature. The fabricated mass sensors are contactless and fast and can afford a method for precision measurements of the ultrasmall mass with two-dimentional materials.

    Read this article

    To access this article, please review the available access options below.

    Get instant access

    Purchase Access

    Read this article for 48 hours. Check out below using your ACS ID or as a guest.

    Recommended

    Access through Your Institution

    You may have access to this article through your institution.

    Your institution does not have access to this content. You can change your affiliated institution below.

    Supporting Information

    ARTICLE SECTIONS
    Jump To

    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsami.0c11913.

    • Crystallographic orientation experiment, piezopotential in single-layer MoS2, nonlinear analysis for the resonant shifts, and frequency analysis for MoS2 mass sensor (PDF)

    Terms & Conditions

    Most electronic Supporting Information files are available without a subscription to ACS Web Editions. Such files may be downloaded by article for research use (if there is a public use license linked to the relevant article, that license may permit other uses). Permission may be obtained from ACS for other uses through requests via the RightsLink permission system: http://pubs.acs.org/page/copyright/permissions.html.

    Cited By

    This article is cited by 42 publications.

    1. Shuto Muranaka, Naoto Horikawa, Ryousuke Ishikawa, Kenji Watanabe, Takashi Taniguchi, Yusuke Hoshi. Anisotropic Wet Etching of WSe2 and MoS2 for Twist-Angle Extraction of Heterobilayers. The Journal of Physical Chemistry C 2024, 128 (17) , 7211-7215. https://doi.org/10.1021/acs.jpcc.4c01228
    2. Aitor Zambudio, Guillermo López-Polín, Pablo Ares, Jaime Colchero, Julio Gómez-Herrero, Cristina Gómez-Navarro. High Frictional Resilience of MoS2 Nanosheets to Induced Atomic Vacancies: Implications for Nanoelectromechanical Devices. ACS Applied Nano Materials 2024, 7 (8) , 9712-9719. https://doi.org/10.1021/acsanm.4c01561
    3. Andrey A. Kistanov, Stepan A. Shcherbinin, Elena A. Korznikova, Oleg V. Prezhdo. Prediction and Characterization of Two-Dimensional Zn2VN3. The Journal of Physical Chemistry Letters 2023, 14 (5) , 1148-1155. https://doi.org/10.1021/acs.jpclett.2c03796
    4. Lijun Ma, Xiao Lei, Xuanqi Guo, Longhai Wang, Shifeng Li, Tan Shu, Gary J. Cheng, Feng Liu. Carbon Black/Graphene Nanosheet Composites for Three-Dimensional Flexible Piezoresistive Sensors. ACS Applied Nano Materials 2022, 5 (5) , 7142-7149. https://doi.org/10.1021/acsanm.2c01081
    5. Shen Liu, Yanping Chen, Huailei Lai, Mengqiang Zou, Hang Xiao, Peijing Chen, Bin Du, Xunzhou Xiao, Jun He, Yiping Wang. Room-Temperature Fiber Tip Nanoscale Optomechanical Bolometer. ACS Photonics 2022, 9 (5) , 1586-1593. https://doi.org/10.1021/acsphotonics.1c01676
    6. Dongchen Tan, Nan Sun, Long Chen, Jingyuan Bu, Chengming Jiang. Piezoelectricity in Monolayer and Multilayer Ti3C2Tx MXenes: Implications for Piezoelectric Devices. ACS Applied Nano Materials 2022, 5 (1) , 1034-1046. https://doi.org/10.1021/acsanm.1c03696
    7. Qikun Li, Chengming Jiang, Sheng Bi, Kyeiwaa Asare-Yeboah, Zhengran He, Yun Liu. Photo-Triggered Logic Circuits Assembled on Integrated Illuminants and Resonant Nanowires. ACS Applied Materials & Interfaces 2020, 12 (41) , 46501-46508. https://doi.org/10.1021/acsami.0c12256
    8. Qunfeng Cheng, Alexander Sinitskii. Mechanical Properties and Reinforcement Effect of Single MXene Flakes and MXene Composites. 2024, 453-484. https://doi.org/10.1002/9781119869528.ch18
    9. Yiqing Zhang, Zhenbo Li, Feng Xu. Dynamic behavior and thermoelastic damping of circular single-layered black phosphorus-based mass sensor. Acta Mechanica 2023, 234 (11) , 5477-5489. https://doi.org/10.1007/s00707-023-03681-5
    10. Tianxun Gong, Wen Huang, Yuhao He, Yiwen He, Xiaosheng Zhang. Nanoscale mass measurement based on suspended graphene. Journal of Physics D: Applied Physics 2023, 56 (39) , 394002. https://doi.org/10.1088/1361-6463/acd85b
    11. Li Sun, Zhongming Wu, Ruikun Niu. Anisotropic frictional characteristics among MoS2/SiO2 layer-dependent heterojunctions. Chemical Physics Letters 2023, 826 , 140639. https://doi.org/10.1016/j.cplett.2023.140639
    12. M. S. Tacca, M. B. Plenio. Group theoretical and ab initio description of color center candidates in fluorographene. Physical Review B 2023, 108 (10) https://doi.org/10.1103/PhysRevB.108.104102
    13. Chengming Jiang, Yan Peng, Dongchen Tan, Lijun Zeng, Jijie Huang, Nan Sun, Sheng Bi, Zhiyuan Tao, Qinglei Guo, Xu Han. Monolayer Oxidized‐MXene Piezo‐Resonators with Single Resonant Peak by Interior Schottky Effect. Advanced Functional Materials 2023, 33 (28) https://doi.org/10.1002/adfm.202215000
    14. Yuzhi Zhang, Zhaofeng Wu, Jun Sun, Qihua Sun, Fengjuan Chen, Min Zhang, Haiming Duan. Synthesis and Sensing Performance of Chitin Fiber/MoS2 Composites. Nanomaterials 2023, 13 (9) , 1567. https://doi.org/10.3390/nano13091567
    15. Mandeep Jangra, Abhishek Thakur, Siddhartha Dam, Souvik Chatterjee, Shamima Hussain. Enhanced dielectric properties of MoS2/ PVDF free-standing, flexible films for energy harvesting applications. Materials Today Communications 2023, 34 , 105109. https://doi.org/10.1016/j.mtcomm.2022.105109
    16. Dong Hoon Shin, Hakseong Kim, Sung Hyun Kim, Hyeonsik Cheong, Peter G. Steeneken, Chirlmin Joo, Sang Wook Lee. Graphene nano-electromechanical mass sensor with high resolution at room temperature. iScience 2023, 26 (2) , 105958. https://doi.org/10.1016/j.isci.2023.105958
    17. M. Rashidifar, S. Darbari, Y. Abdi. Ag-Si-MoS2 based piezo-phototransistor. Optics & Laser Technology 2023, 158 , 108788. https://doi.org/10.1016/j.optlastec.2022.108788
    18. Shen Liu, Peijing Chen, Junxian Luo, Yanping Chen, Bonan Liu, Hang Xiao, Wenqi Yan, Wei Ding, Zhiyong Bai, Jun He, Yiping Wang. Nano-Optomechanical Resonators Based Graphene/Au Membrane for Current Sensing. Journal of Lightwave Technology 2022, 40 (21) , 7200-7207. https://doi.org/10.1109/JLT.2022.3198116
    19. Jeonghoon Moon, Sungjun Park, Sangkil Lim. A Novel High-Speed Resonant Frequency Tracking Method Using Transient Characteristics in a Piezoelectric Transducer. Sensors 2022, 22 (17) , 6378. https://doi.org/10.3390/s22176378
    20. Dongchen Tan, Xuguang Cao, Jijie Huang, Yan Peng, Lijun Zeng, Qinglei Guo, Nan Sun, Sheng Bi, Ruonan Ji, Chengming Jiang. Monolayer MXene Nanoelectromechanical Piezo‐Resonators with 0.2 Zeptogram Mass Resolution. Advanced Science 2022, 9 (22) https://doi.org/10.1002/advs.202201443
    21. Pu Feng, Sixiang Zhao, Congcong Dang, Sixian He, Ming Li, Liancheng Zhao, Liming Gao. Improving the photoresponse performance of monolayer MoS 2 photodetector via local flexoelectric effect. Nanotechnology 2022, 33 (25) , 255204. https://doi.org/10.1088/1361-6528/ac5da1
    22. Hongki Lee, Joel Berk, Aaron Webster, Donghyun Kim, Matthew R Foreman. Label-free detection of single nanoparticles with disordered nanoisland surface plasmon sensor. Nanotechnology 2022, 33 (16) , 165502. https://doi.org/10.1088/1361-6528/ac43e9
    23. Qi Li, Jianping Meng, Zhou Li. Recent progress on Schottky sensors based on two-dimensional transition metal dichalcogenides. Journal of Materials Chemistry A 2022, 10 (15) , 8107-8128. https://doi.org/10.1039/D2TA00075J
    24. Hongbo Song, Daqing Yin. Engine Knock Sensor Based on Symmetrical Rhomboid Structure-Encapsulated Fiber Bragg Grating. Symmetry 2022, 14 (4) , 711. https://doi.org/10.3390/sym14040711
    25. Hemin Zhang, Aojie Quan, Chen Wang, Chenxi Wang, Linlin Wang, Michael Kraft. On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors. Journal of Microelectromechanical Systems 2022, 31 (2) , 180-182. https://doi.org/10.1109/JMEMS.2022.3141830
    26. Yang Xiao, Fang Luo, Yuchen Zhang, Feng Hu, Mengjian Zhu, Shiqiao Qin. A Review on Graphene-Based Nano-Electromechanical Resonators: Fabrication, Performance, and Applications. Micromachines 2022, 13 (2) , 215. https://doi.org/10.3390/mi13020215
    27. Cuihong Han, Guolu Li, Guozheng Ma, Jiadong Shi, Zhen Li, Qingsong Yong, Haidou Wang. Effect of UV Radiation on Structural Damage and Tribological Properties of Mo/MoS2-Pb-PbS Composite Films. Coatings 2022, 12 (1) , 100. https://doi.org/10.3390/coatings12010100
    28. J. Arunguvai, P. Lakshmi. Flexible Piezoelectric MoS2/P(VDF-TrFE) Nanocomposite Film for Vibration Energy Harvesting. Journal of Electronic Materials 2021, 50 (12) , 6870-6880. https://doi.org/10.1007/s11664-021-09204-z
    29. Dongchen Tan, Chengming Jiang, Nan Sun, Jijie Huang, Zhe Zhang, Qingxiao Zhang, Jingyuan Bu, Sheng Bi, Qinglei Guo, Jinhui Song. Piezoelectricity in monolayer MXene for nanogenerators and piezotronics. Nano Energy 2021, 90 , 106528. https://doi.org/10.1016/j.nanoen.2021.106528
    30. Masaya Umeda, Naoki Higashitarumizu, Ryo Kitaura, Tomonori Nishimura, Kosuke Nagashio. Identification of the position of piezoelectric polarization at the MoS 2 /metal interface. Applied Physics Express 2021, 14 (12) , 125002. https://doi.org/10.35848/1882-0786/ac3d1f
    31. Dongchen Tan, Chengming Jiang, Qikun Li, Sheng Bi, Xiaohu Wang, Jinhui Song. Development and current situation of flexible and transparent EM shielding materials. Journal of Materials Science: Materials in Electronics 2021, 32 (21) , 25603-25630. https://doi.org/10.1007/s10854-021-05409-4
    32. Cao Xia, Dong F. Wang, Takahito Ono, Toshihiro Itoh, Masayoshi Esashi. Internal resonance in coupled oscillators – Part I: A double amplification mass sensing scheme without Duffing nonlinearity. Mechanical Systems and Signal Processing 2021, 159 , 107886. https://doi.org/10.1016/j.ymssp.2021.107886
    33. Qin Zhang, Shanling Zuo, Ping Chen, Caofeng Pan. Piezotronics in two‐dimensional materials. InfoMat 2021, 3 (9) , 987-1007. https://doi.org/10.1002/inf2.12220
    34. Li Sun, Nan Sun, Yongchen Liu, Chengming Jiang. Anisotropic frictional properties between Ti3C2Tx MXene/SiO2 layer-dependent heterojunctions. Journal of Science: Advanced Materials and Devices 2021, 6 (3) , 488-493. https://doi.org/10.1016/j.jsamd.2021.05.006
    35. Lingyu Zang, Long Chen, Dongchen Tan, Xuguang Cao, Nan Sun, Chengming Jiang. Research on Multi‐morphology Evolution of MoS 2 in Chemical Vapor Deposition. ChemistrySelect 2021, 6 (31) , 8107-8113. https://doi.org/10.1002/slct.202101843
    36. Hong Yu, Yan Shang, Lei Pei, Guiling Zhang, Hong Yan. Spin-polarized gate-tuned transport property of a four-terminal MoS2 device: a theoretical study. Journal of Materials Science 2021, 56 (20) , 11847-11865. https://doi.org/10.1007/s10853-021-06046-2
    37. Huimin Qiao, Chenxi Wang, Woo Seok Choi, Min Hyuk Park, Yunseok Kim. Ultra-thin ferroelectrics. Materials Science and Engineering: R: Reports 2021, 145 , 100622. https://doi.org/10.1016/j.mser.2021.100622
    38. Li Sun, Nan Sun, Yongchen Liu, Chengming Jiang. A High-sensitivity Knock Sensor Based on ZnO Nanowires Array as Piezoelectric Nanogenerator. Chemistry Letters 2021, 50 (6) , 1118-1122. https://doi.org/10.1246/cl.210115
    39. Xuguang Cao, Chengming Jiang, Dongchen Tan, Qikun Li, Sheng Bi, Jinhui Song. Recent mechanical processing techniques of two-dimensional layered materials: A review. Journal of Science: Advanced Materials and Devices 2021, 6 (2) , 135-152. https://doi.org/10.1016/j.jsamd.2021.01.005
    40. Dongsheng Li, Hanyong Dong, Zihao Xie, Qian Zhang, Mengjiao Qu, Yongqing Fu, Jin Xie. High Resolution and Fast Response of Humidity Sensor Based on AlN Cantilever With Two Groups of Segmented Electrodes. IEEE Electron Device Letters 2021, 42 (6) , 923-926. https://doi.org/10.1109/LED.2021.3073722
    41. Dongchen Tan, Chengming Jiang, Xuguang Cao, Nan Sun, Qikun Li, Sheng Bi, Jinhui Song. Recent advances in MXene-based force sensors: a mini-review. RSC Advances 2021, 11 (31) , 19169-19184. https://doi.org/10.1039/D1RA02857J
    42. M Caglar, U F Keyser. Ionic and molecular transport in aqueous solution through 2D and layered nanoporous membranes. Journal of Physics D: Applied Physics 2021, 54 (18) , 183002. https://doi.org/10.1088/1361-6463/abe07b