Gas Sensor by Direct Growth and Functionalization of Metal Oxide/Metal Sulfide Core–Shell Nanowires on Flexible SubstratesClick to copy article linkArticle link copied!
- Daejong YangDaejong YangDepartment of Mechanical and Automotive Engineering, Kongju National University, 1223-24 Cheonan-daero, Seobuk-gu, Cheonan, Chungcheongnam-do 31080, South KoreaMore by Daejong Yang
- Incheol ChoIncheol ChoDepartment of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, South KoreaMore by Incheol Cho
- Donghwan KimDonghwan KimKorea Electric Power Research Institute (KEPRI), Korea Electric Power Corporation (KEPCO), 105 Munji-ro, Yuseong-gu, Daejeon 34056, South KoreaMore by Donghwan Kim
- Mi Ae LimMi Ae LimDepartment of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, South KoreaMore by Mi Ae Lim
- Zhiyong LiZhiyong LiSystems Research Lab, Hewlett Packard Laboratory, 1501 Page Mill Rd, Palo Alto, California 94304, United StatesMore by Zhiyong Li
- Jong G. OkJong G. OkDepartment of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, 232 Gongneung-ro, Nowon-gu, Seoul 01811, South KoreaMore by Jong G. Ok
- Moonjin LeeMoonjin LeeKorea Research Institute of Ships & Ocean Engineering, 1312-32 Yuseong-daero, Yuseong-gu, Daejeon 34103, South KoreaMore by Moonjin Lee
- Inkyu Park*Inkyu Park*E-mail: [email protected]Department of Mechanical Engineering and KI for the NanoCentury, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, South KoreaMore by Inkyu Park
Abstract

We have developed a novel fabrication method for flexible gas sensors for toxic gases based on sequential wet chemical reaction. In specific, zinc oxide (ZnO) nanowires were locally synthesized and directly integrated on a flexible polymer substrate using localized hydrothermal synthesis methods and their surfaces were selectively functionalized with palladium (Pd) nanoparticles using a liquid phase deposition process. Because the entire process is conducted at a low temperature in a mild precursor solution, it can be applied for flexible substrates. Furthermore, the surface of ZnO nanowires was sulfurized by hydrogen sulfide (H2S) gas to form zinc oxide/zinc sulfide (ZnO/ZnS) core–shell nanowires for stable sensing of H2S gas. The locally synthesized ZnO/ZnS core–shell nanowires enable an ultracompact-sized device, and Pd nanoparticles improve the sensing performance and reduce the operating temperature (200 °C). The device shows a high sensitivity [(Ggas – Gair)/Gair × 100% = 4491% to 10 ppm], fast response (response/recovery time <100 s) to hydrogen sulfide, and outstanding selectivity (>100 times) to other toxic gases (e.g., carbon monoxide, acetone, ethanol, and toluene). Moreover, vertically synthesized nanowires provide a long bending path, which reduces the mechanical stresses on the structure. The devices showed stable gas sensing performance under 9 mm positive radius of curvature and 5 mm negative radius of curvature. The mechanical robustness of the device was also verified by numerical simulations which showed dramatic decrease of maximum stress and strain to 4.2 and 5.0%, respectively.
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