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Atomically Thin MoS2 Layers Selectively Grown on Mo Patterned Substrates for Field-Effect-Controlled Photosensors

Cite this: ACS Appl. Nano Mater. 2024, 7, 5, 5051–5062
Publication Date (Web):February 28, 2024
https://doi.org/10.1021/acsanm.3c05809
Copyright © 2024 American Chemical Society

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    Abstract

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    Selective growth of 2D MoS2 layers on patterned substrates is highly desired for easy fabrication of devices. Selectively grown 2D MoS2 on Mo patterned substrates for the formation of intimate metallic contact was obtained by a Mo-CVD method in which MoO2 from an oxidized Mo pattern and S powder are the growth precursors. Mo films were deposited by magnetron sputtering on SiO2(300 nm)/c-Si substrates and patterned by photolithography techniques for obtaining Mo strips and finger contact structures, with the gap between the strips and finger varied from 5 to 20 μm. The filling of the gap by selectively grown atomically thin MoS2 plates of 1–2 monolayers (MLs) was demonstrated by scanning electron microscopy and atomic force microscopy imaging. Field effect devices for the characterization of the photosensitivity of selectively grown MoS2 have been fabricated from finger contact structures. The dark current is drastically reduced from 10–9 to 10–13–10–14 A by varying the gate voltage from +7 to −7 V, showing the n-type semiconductor behavior of the selectively grown 2D MoS2. High photosensitivity of 105 (%) was obtained for 4.5 × 10–4 mW/cm2 at 650 nm wavelength illumination. The spectral responsivity reaches values of 15–25 A/W at 600 nm wavelength and shows an energy onset of 1.72–1.77 eV corresponding to about 2 ML MoS2. The carrier-trapping effect responsible for the slow part of the device response can be caused by structural defects and also by adsorbed molecules like in gas sensors.

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    • Additional information for PVD selective growth and for Mo-CVD selective growth (PDF)

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