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Nonthermal Plasma Synthesis of Composition-Tunable Silicon Nitride Nanoparticle Films for Passive Radiative Cooling
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    Nonthermal Plasma Synthesis of Composition-Tunable Silicon Nitride Nanoparticle Films for Passive Radiative Cooling
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    ACS Applied Optical Materials

    Cite this: ACS Appl. Opt. Mater. 2024, 2, 6, 935–944
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    https://doi.org/10.1021/acsaom.3c00257
    Published November 30, 2023
    Copyright © 2023 American Chemical Society

    Abstract

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    Passive radiative cooling (PRC) technologies have seen growing attention due to the increasing need for scalable, low-cost, and low-maintenance cooling devices. PRC devices work by minimizing the absorption of light in the visible spectrum (300–700 nm) while optimizing for high emissivity in the infrared atmospheric transmission window (8–14 μm). However, identifying and synthesizing a material or material structure with these precise properties have been found to be challenging. Recently, simulations of silicon nitride (SiNx) nanoparticle films showed potential significant cooling power improvements over current PRC structures. In this work, we show a scalable, single step, and tunable synthesis technique to produce such homogeneous SiNx nanoparticle films. By using SiH4, Ar, and N2 injected into nonthermal plasma, the nanoparticle composition can be tuned with plasma power. Characterizing the optical properties of the films, we observe high infrared absorption and visible transparency, as required for PRC. The film composition was found to be tunable between stoichiometric Si3N4 and nitrogen-poor SiNx, depending only on the plasma power. Finally, high plasma powers lead to silicon nanocrystal precipitation, suggesting an optimal plasma power for PRC film formation.

    Copyright © 2023 American Chemical Society

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsaom.3c00257.

    • SEM figures of SiNx samples and FTIR and absorption spectra of oxidized SiNx samples (PDF)

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    This article is cited by 1 publications.

    1. Xiaohu Wu, Yang Hu, Haotuo Liu, Yao Hong. The potential of hyperbolic films for radiative heat transfer in micro/nanoscale. DeCarbon 2024, 4 , 100047. https://doi.org/10.1016/j.decarb.2024.100047

    ACS Applied Optical Materials

    Cite this: ACS Appl. Opt. Mater. 2024, 2, 6, 935–944
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsaom.3c00257
    Published November 30, 2023
    Copyright © 2023 American Chemical Society

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