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    Article

    Tailored Nanopatterning by Controlled Continuous Nanoinscribing with Tunable Shape, Depth, and Dimension
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    • Dong Kyo Oh
      Dong Kyo Oh
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Dong Kyo Oh
    • Seungjo Lee
      Seungjo Lee
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Seungjo Lee
    • Seung Hu Lee
      Seung Hu Lee
      Department of Energy Systems Research, Ajou University, Suwon 16499, Korea
      More by Seung Hu Lee
    • Wonseok Lee
      Wonseok Lee
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Wonseok Lee
    • Gyubeom Yeon
      Gyubeom Yeon
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Gyubeom Yeon
    • Nayeong Lee
      Nayeong Lee
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      Research Center for Electrical and Information Technology, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Nayeong Lee
    • Kang-Soo Han
      Kang-Soo Han
      Display Research Center, Samsung Display, Co., Ltd., Gyeonggi-do 17113, Korea
      More by Kang-Soo Han
    • Sunmin Jung
      Sunmin Jung
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Sunmin Jung
    • Dong Ha Kim
      Dong Ha Kim
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Dong Ha Kim
    • Dae-Young Lee
      Dae-Young Lee
      Display Research Center, Samsung Display, Co., Ltd., Gyeonggi-do 17113, Korea
      More by Dae-Young Lee
    • Sang Hoon Lee
      Sang Hoon Lee
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      Research Center for Electrical and Information Technology, Seoul National University of Science and Technology, Seoul 01811, Korea
      More by Sang Hoon Lee
    • Hui Joon Park*
      Hui Joon Park
      Department of Organic and Nano Engineering, Hanyang University, Seoul 04763, Korea
      *E-mail: [email protected] (H.J.P.).
      More by Hui Joon Park
      Orcidhttp://orcid.org/0000-0003-4607-207X
    • Jong G. Ok*
      Jong G. Ok
      Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea
      *E-mail: [email protected] (J.G.O.).
      More by Jong G. Ok
      Orcidhttp://orcid.org/0000-0002-8703-2915
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    ACS Nano

    Cite this: ACS Nano 2019, 13, 10, 11194–11202
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    https://doi.org/10.1021/acsnano.9b04221
    Published October 8, 2019
    Copyright © 2019 American Chemical Society
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    Abstract

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    We present that the tailored nanopatterning with tunable shape, depth, and dimension for diverse application-specific designs can be realized by utilizing controlled dynamic nanoinscribing (DNI), which can generate bur-free plastic deformation on various flexible substrates via continuous mechanical inscription of a small sliced edge of a nanopatterned mold in a compact and vacuum-free system. Systematic controlling of prime DNI processing parameters including inscribing force, temperature, and substrate feed rate can determine the nanopattern depths and their specific profiles from rounded to angular shapes as a summation of the force-driven plastic deformation and heat-driven thermal deformation. More complex nanopatterns with gradient depths and/or multidimensional profiles can also be readily created by modulating the horizontal mold edge alignment and/or combining sequential DNI strokes, which otherwise demand laborious and costly procedures. Many practical user-specific applications may benefit from this study by tailor-making the desired nanopattern structures within desired areas, including precision machine and optics components, transparent electronics and photonics, flexible sensors, and reattachable and wearable devices. We demonstrate one vivid example in which the light diffusion direction of a light-emitting diode can be tuned by application of specifically designed DNI nanopatterns.

    Copyright © 2019 American Chemical Society

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    Supporting Information

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    The Supporting Information is available free of charge on the ACS Publications website at DOI: 10.1021/acsnano.9b04221.

    • Photographs of an experimental system setup, schematic comparison between traditional extrusion and dynamic nanoinscribing, mold degradation, and processable area ratio calculation (PDF)

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    ACS Nano

    Cite this: ACS Nano 2019, 13, 10, 11194–11202
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsnano.9b04221
    Published October 8, 2019
    Copyright © 2019 American Chemical Society
    Request reuse permissions

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