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Direct Growth of Hexagonal Boron Nitride on Photonic Chips for High-Throughput Characterization

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Download Hi-Res ImageDownload to MS-PowerPointCite This:ACS Photonics 2021, 8, 7, 2033-2040
    Article

    Direct Growth of Hexagonal Boron Nitride on Photonic Chips for High-Throughput Characterization
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    • Evgenii Glushkov*
      Evgenii Glushkov
      Laboratory of Nanoscale Biology, Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
      *E-mail: [email protected]
      More by Evgenii Glushkov
      Orcidhttps://orcid.org/0000-0001-7715-4524
    • Noah Mendelson
      Noah Mendelson
      School of Mathematical and Physical Sciences, University of Technology Sydney, Ultimo, NSW 2007, Australia
      More by Noah Mendelson
    • Andrey Chernev
      Andrey Chernev
      Laboratory of Nanoscale Biology, Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
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    • Ritika Ritika
      Ritika Ritika
      School of Mathematical and Physical Sciences, University of Technology Sydney, Ultimo, NSW 2007, Australia
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    • Martina Lihter
      Martina Lihter
      Laboratory of Nanoscale Biology, Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
      More by Martina Lihter
      Orcidhttps://orcid.org/0000-0003-1859-8453
    • Reza R. Zamani
      Reza R. Zamani
      Centre Interdisciplinaire de Microscopie Électronique (CIME), École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
      More by Reza R. Zamani
      Orcidhttps://orcid.org/0000-0001-6940-0000
    • Jean Comtet
      Jean Comtet
      Laboratory of Soft Matter Science and Engineering, ESPCI Paris, PSL University, CNRS, Sorbonne Université, 75005 Paris, France
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    • Vytautas Navikas
      Vytautas Navikas
      Laboratory of Nanoscale Biology, Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
      More by Vytautas Navikas
    • Igor Aharonovich
      Igor Aharonovich
      School of Mathematical and Physical Sciences, University of Technology Sydney, Ultimo, NSW 2007, Australia
      ARC Center of Excellence for Transformative Meta-Optical Systems (TMOS), Faculty of Science, University of Technology Sydney, Ultimo, NSW 2007, Australia
      More by Igor Aharonovich
      Orcidhttps://orcid.org/0000-0003-4304-3935
    • Aleksandra Radenovic*
      Aleksandra Radenovic
      Laboratory of Nanoscale Biology, Institute of Bioengineering, École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
      *E-mail: [email protected]
      More by Aleksandra Radenovic
      Orcidhttps://orcid.org/0000-0001-8194-2785
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    ACS Photonics

    Cite this: ACS Photonics 2021, 8, 7, 2033–2040
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    https://doi.org/10.1021/acsphotonics.1c00165
    Published June 28, 2021
    Copyright © 2021 American Chemical Society
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    Abstract

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    Adapting optical microscopy methods for nanoscale characterization of defects in two-dimensional (2D) materials is a vital step for photonic on-chip devices. To increase the analysis throughput, waveguide-based on-chip imaging platforms have been recently developed. Their inherent disadvantage, however, is the necessity to transfer the 2D material from the growth substrate to the imaging chip, which introduces nonuniform material coverage and contamination, potentially altering the characterization results. Here we present a unique approach to circumvent these shortfalls by directly growing a widely used 2D material (hexagonal boron nitride, hBN) on silicon nitride chips and optically characterizing the defects in the intact as-grown material. We compare the direct growth approach to the standard PMMA-assisted wet transfer method and confirm the clear advantages of the direct growth. While demonstrated with hBN in the current work, the method can be extended to other 2D materials.

    Copyright © 2021 American Chemical Society

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    Supporting Information

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsphotonics.1c00165.

    • AFM image of the directly grown hBN, AFM image of the bare chip, confocal spectral characterization of the as-grown material, EDX characterization of directly grown hBN in SEM, estimating interlayer distance via selected-area FFT of the TEM image, electron energy loss spectroscopy (EELS) analysis of directly grown material, AFM image of the transferred hBN film, and line profile from the AFM image of the transferred hBN film (PDF)

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    Cited By

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    This article is cited by 10 publications.

    1. Jiye Kim, Kyung-Yeon Doh, Seokho Moon, Chang-Won Choi, Hokyeong Jeong, Jaewon Kim, Wonseok Yoo, Kyungwook Park, Kyeongock Chong, Chunhyng Chung, Hanmei Choi, Si-Young Choi, Donghwa Lee, Jong Kyu Kim. Conformal Growth of Hexagonal Boron Nitride on High-Aspect-Ratio Silicon-Based Nanotrenches. Chemistry of Materials 2023, 35 (6) , 2429-2438. https://doi.org/10.1021/acs.chemmater.2c03568
    2. Hongwei Liu, Noah Mendelson, Irfan H. Abidi, Shaobo Li, Zhenjing Liu, Yuting Cai, Kenan Zhang, Jiawen You, Mohsen Tamtaji, Hoilun Wong, Yao Ding, Guojie Chen, Igor Aharonovich, Zhengtang Luo. Rational Control on Quantum Emitter Formation in Carbon-Doped Monolayer Hexagonal Boron Nitride. ACS Applied Materials & Interfaces 2022, 14 (2) , 3189-3198. https://doi.org/10.1021/acsami.1c21781
    3. Chi Li, Johannes E. Fröch, Milad Nonahal, Thinh N. Tran, Milos Toth, Sejeong Kim, Igor Aharonovich. Integration of hBN Quantum Emitters in Monolithically Fabricated Waveguides. ACS Photonics 2021, 8 (10) , 2966-2972. https://doi.org/10.1021/acsphotonics.1c00890
    4. Anustup Das, Dong Jun Lee, Prasoon K. Shandilya, Sejeong Kim, Gumin Kang, David P. Lake, Bishnupada Behera, Denis Sukachev, Igor Aharonovich, Jung-Hyun Lee, Jaehyun Park, Paul E. Barclay. Demonstration of Hybrid High-Q Hexagonal Boron Nitride Microresonators. ACS Photonics 2021, 8 (10) , 3027-3033. https://doi.org/10.1021/acsphotonics.1c00973
    5. Mingzeng Peng, Jiadong Cheng, Xinhe Zheng, Jingwen Ma, Ziyao Feng, Xiankai Sun. 2D-materials-integrated optoelectromechanics: recent progress and future perspectives. Reports on Progress in Physics 2023, 86 (2) , 026402. https://doi.org/10.1088/1361-6633/ac953e
    6. Yong Pan, Li Wang, Yan Zhang, Xueqiong Su, Dongwen Gao, Ruixiang Chen, Lun Huang, Wei Sun, Yuxin Zhao, Dangli Gao. Multi‐Wavelength Laser Emission by Hot‐Carriers Transfers in Perovskite‐Graphene‐Chalcogenide Quantum Dots. Advanced Optical Materials 2022, 10 (21) , 2201044. https://doi.org/10.1002/adom.202201044
    7. Athira Kuppadakkath, Emad Najafidehaghani, Ziyang Gan, Alessandro Tuniz, Gia Quyet Ngo, Heiko Knopf, Franz J. F. Löchner, Fatemeh Abtahi, Tobias Bucher, Sai Shradha, Thomas Käsebier, Stefano Palomba, Nadja Felde, Pallabi Paul, Tobias Ullsperger, Sven Schröder, Adriana Szeghalmi, Thomas Pertsch, Isabelle Staude, Uwe Zeitner, Antony George, Andrey Turchanin, Falk Eilenberger. Direct growth of monolayer MoS 2 on nanostructured silicon waveguides. Nanophotonics 2022, 11 (19) , 4397-4408. https://doi.org/10.1515/nanoph-2022-0235
    8. Li Fang, Yun Ni, Jisong Hu, Zhengfu Tong, Xinguo Ma, Hui Lv, Shaocong Hou. First-principles insights of electronic properties of Blue Phosphorus/MoSi2N4 van der Waals heterostructure via vertical electric field and biaxial strain. Physica E: Low-dimensional Systems and Nanostructures 2022, 143 , 115321. https://doi.org/10.1016/j.physe.2022.115321
    9. Raj N. Patel, David A. Hopper, Jordan A. Gusdorff, Mark E. Turiansky, Tzu-Yung Huang, Rebecca E. K. Fishman, Benjamin Porat, Chris G. Van de Walle, Lee C. Bassett. Probing the Optical Dynamics of Quantum Emitters in Hexagonal Boron Nitride. PRX Quantum 2022, 3 (3) https://doi.org/10.1103/PRXQuantum.3.030331
    10. Morteza Sasani Ghamsari. Chip-Scale Quantum Emitters. Quantum Reports 2021, 3 (4) , 615-642. https://doi.org/10.3390/quantum3040039
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    ACS Photonics

    Cite this: ACS Photonics 2021, 8, 7, 2033–2040
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsphotonics.1c00165
    Published June 28, 2021
    Copyright © 2021 American Chemical Society
    Request reuse permissions

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