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Significant Enhancement in the Power Density of Micro-Supercapacitors by the In Situ Growth of TiN/TiOxNy-Laminated Films

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    Research Article

    Significant Enhancement in the Power Density of Micro-Supercapacitors by the In Situ Growth of TiN/TiOxNy-Laminated Films
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    • Nana Sun
      Nana Sun
      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Materials Science and Engineering, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China
      More by Nana Sun
    • Dayu Zhou*
      Dayu Zhou
      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Materials Science and Engineering, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China
      *Email: [email protected]
      More by Dayu Zhou
      Orcidhttps://orcid.org/0000-0001-5143-9230
    • Wenwen Liu
      Wenwen Liu
      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Materials Science and Engineering, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China
      More by Wenwen Liu
    • Yunpeng Su
      Yunpeng Su
      Geneus Technologies (Chengdu) Co., Ltd., 88 Keyuan South Road, Chengdu 610041, China
      More by Yunpeng Su
    • Peng Jiang
      Peng Jiang
      Geneus Technologies (Chengdu) Co., Ltd., 88 Keyuan South Road, Chengdu 610041, China
      More by Peng Jiang
    • Yaozhong Zou
      Yaozhong Zou
      Geneus Technologies (Chengdu) Co., Ltd., 88 Keyuan South Road, Chengdu 610041, China
      More by Yaozhong Zou
    • Shuyan Shi
      Shuyan Shi
      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Materials Science and Engineering, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China
      More by Shuyan Shi
    • Qingyu Zhang
      Qingyu Zhang
      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, 2 Linggong Road, Dalian 116024, China
      More by Qingyu Zhang
      Orcidhttps://orcid.org/0000-0003-3324-9577
    Other Access OptionsSupporting Information (1)

    ACS Sustainable Chemistry & Engineering

    Cite this: ACS Sustainable Chem. Eng. 2022, 10, 11, 3614–3622
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    https://doi.org/10.1021/acssuschemeng.1c08382
    Published March 9, 2022
    Copyright © 2022 American Chemical Society
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    Abstract

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    Micro-supercapacitors (MSCs) are considered promising micropower sources for Internet-of-things applications. Although the performances of MSCs have been significantly advanced by fabricating nanostructured materials and developing thin-film manufacturing technologies and device architectures, they are still limited by low energy densities and slow rate capabilities. In this work, we introduce a new in situ growth concept to fabricate on-chip micro-supercapacitors in which a highly conductive TiN film used as a current collector offers fast electron transport paths and porous TiOxNy film served as the pseudocapacitive electrode provides large capacitance. Such a design brings the device an ultrahigh power density (105.0 W cm–3) while keeping a high energy density (31.5 mWh cm–3) and excellent cycle stability. The TiN/TiOxNy laminated films with superior performances hold great promises for applications of miniaturized energy storage devices.

    Copyright © 2022 American Chemical Society

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    Supporting Information

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acssuschemeng.1c08382.

    • Method of electrochemical characterizations, scheme of the in situ preparation, SEM and AFM images, CV, GCD, EIS curves, and Ragone plots of MSCs (PDF)

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    Cited By

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    This article is cited by 9 publications.

    1. Lizhong He, Gexi Wang, Najeeb ur Rehman Lashari, Zengpeng Guo, Mengbin Li. Polypyrrole-Derived Carbon Coated NiCoMn Layered Double Hydroxides for High-Performance Supercapacitors. ACS Applied Nano Materials 2023, 6 (18) , 16400-16413. https://doi.org/10.1021/acsanm.3c02565
    2. Mengxiao Wang, Dayu Zhou, Jin Xu, Yunpeng Su, Jiaye Gu, Nana Sun, Jinyang Sui, Bin Zhang, Wenjin Zhao. Enhanced capacitive performance and stability of on-chip micro-supercapacitor electrode films via TiN-Mo2N alloying and laminating strategies. Chemical Engineering Journal 2025, 8 , 159594. https://doi.org/10.1016/j.cej.2025.159594
    3. Mengxiao Wang, Jin Xu, Yunpeng Su, Jiaye Gu, Nana Sun, Jinyang Sui, Bin Zhang, Dayu Zhou. Impacts of substrate materials on microstructure and electrochemical properties of Ti/TiN/TiON laminated films for gene sequencing chips. Applied Materials Today 2024, 41 , 102524. https://doi.org/10.1016/j.apmt.2024.102524
    4. Kenji Takada, Miyu Ito, Naoya Fukui, Hiroshi Nishihara. Modulation between capacitor and conductor for a redox-active 2D bis(terpyridine)cobalt(II) nanosheet via anion-exchange. Communications Chemistry 2024, 7 (1) https://doi.org/10.1038/s42004-024-01274-4
    5. Qijing Gao, Wenyan Shi, Wenqian Chen. Synthesis and photocatalytic activity of cation-doped titanium oxynitrides (Ti 2.85− x M x O 4 N, M = Zn, Co, Cu). Dalton Transactions 2024, 53 (41) , 17071-17082. https://doi.org/10.1039/D4DT02378A
    6. Jinqi Li, Jin Xu, Jinming Gao, Mengxiao Wang, Dayu Zhou. Optimization of TiN/TiO x N y Laminated Electrode Films for High-Performance Gene Sequencing Chip. Journal of The Electrochemical Society 2024, 171 (4) , 043501. https://doi.org/10.1149/1945-7111/ad3a17
    7. Wenqian Chen, Jinkun Li, Zihan Wang, Heng Wang, Yong Li, Liang Tang. Synthesis of TiO x N y oxynitrides with a tunable nitrogen content. Dalton Transactions 2024, 53 (3) , 1265-1273. https://doi.org/10.1039/D3DT02892E
    8. Manas Mandal, Krishna Chattopadhyay, Atanu Mitra, Dipankar Halder. Micro-supercapacitors based on thin films: Journey so far. 2024, 262-274. https://doi.org/10.1016/B978-0-323-96020-5.00092-3
    9. Mengxiao Wang, Shuyan Shi, Jin Xu, Yunpeng Su, Jiaye Gu, Nana Sun, Wenjin Zhao, Dayu Zhou. Long-Term Stability of Electrical and Electrochemical Properties of Tin Film in the Atmosphere Environment. 2024https://doi.org/10.2139/ssrn.4862058
    10. Mengxiao Wang, Jin Xu, Yunpeng Su, Jiaye Gu, Nana Sun, Jinyang Sui, Bin Zhang, Dayu Zhou. Impacts of Substrate Materials on Microstructure and Electrochemical Properties of Ti/TiN/TiON Laminated Films for Gene Sequencing Chips. 2024https://doi.org/10.2139/ssrn.4870945
    11. Yujing Liu, Qi Liu, Chengjie Li, Wenyan Li, Boyang Zhang, Zhongqiu Liu, Anguo Ying. Engineering lateral and vertical heterostructures for supercapacitors with unprecedented energy density. Applied Surface Science 2023, 609 , 155328. https://doi.org/10.1016/j.apsusc.2022.155328
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    ACS Sustainable Chemistry & Engineering

    Cite this: ACS Sustainable Chem. Eng. 2022, 10, 11, 3614–3622
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acssuschemeng.1c08382
    Published March 9, 2022
    Copyright © 2022 American Chemical Society
    Request reuse permissions

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