In Situ Investigations into the Mechanism of Oxygen Catalysis on Ruthenium/Manganese Surfaces and the Thermodynamic Stability of Ru/Mn-Based Copper Diffusion Barrier LayersClick to copy article linkArticle link copied!
Abstract
This study shows direct experimental evidence of the catalytic activity of bimetallic ruthenium/manganese surfaces toward oxygen and determines how this activity impacts the thermodynamic stability of Ru/Mn-based copper diffusion barrier layers for advanced microelectronic devices. X-ray photoemission spectroscopy (XPS) analysis, as part of a fully in situ experimental procedure, showed the thermal dissociation of manganese monoxide (MnO) and the desorption of oxygen in the presence of Ru at 500 °C. This is in contrast with the thermal stability of MnO in the absence of Ru at temperatures up to 700 °C and suggests that the presence of Ru increases the catalytic activity of Mn surfaces by reducing the MnO dissociation energy and the oxygen desorption energy. XPS analysis showed no evidence of a change in the chemical composition of the Ru layer, consistent with previously proposed mechanisms for oxygen catalysis on bimetallic surfaces. Further studies investigated the impact of the presence of Ru on the chemical composition and thermodynamic stability of Mn–O-based copper diffusion barrier layers, which were preformed in situ in ultra high vacuum. Results from separate experiments show that the presence of Ru liner layers (∼2 nm) causes the partial dissociation of both MnO and MnSiO3 barrier layers (∼5 nm) following 500 °C thermal annealing. This result is again attributed to the catalytic activity of Ru/Mn surfaces reducing the dissociation energy of the Mn–O bond within the barrier layer region.
Cited By
This article is cited by 7 publications.
- Kirak Son, Youn-Hye Kim, Soo-Hyun Kim, Young-Bae Park. Interfacial adhesion energies of Ru–Mn direct plateable diffusion barriers prepared by atomic layer deposition for advanced Cu interconnects. Journal of Materials Science: Materials in Electronics 2021, 32
(15)
, 20559-20569. https://doi.org/10.1007/s10854-021-06567-1
- Renata Lippi, Campbell J. Coghlan, Shaun C. Howard, Christopher D. Easton, Qinfen Gu, Jim Patel, Christopher J. Sumby, Danielle F. Kennedy, Christian J. Doonan. In Situ MOF-Templating of Rh Nanocatalysts under Reducing Conditions. Australian Journal of Chemistry 2020, 73
(12)
, 1271. https://doi.org/10.1071/CH20193
- Junting Liu, Leilei Li, Zhennan Liu, Wanli Wu, Yujian Wang, Jie Xu, Feng Gao. Effect of different MnO2 phases (β-, γ-, and ε-) on the microstructure and piezoelectric properties of Pb(Zr1/2Ti1/2)O3–Pb(Zn1/3Nb2/3)O3–Pb(Ni1/3Nb2/3)O3 ceramics for energy harvesting. Journal of Materials Science: Materials in Electronics 2019, 30
(24)
, 21297-21304. https://doi.org/10.1007/s10854-019-02504-5
- Jae-Hyung Park, Dong-Suk Han, Kyoung-Deok Kim, Jong-Wan Park. Effects of plasma pretreatment on the process of self-forming Cu–Mn alloy barriers for Cu interconnects. AIP Advances 2018, 8
(2)
https://doi.org/10.1063/1.4993051
- Kangzhe Cao, Huiqiao Liu, Xiaohong Xu, Yijing Wang, Lifang Jiao. FeMnO
3
: a high-performance Li-ion battery anode material. Chemical Communications 2016, 52
(76)
, 11414-11417. https://doi.org/10.1039/C6CC04891A
- A.P. McCoy, J. Bogan, A. Brady, G. Hughes. Oxidation of ruthenium thin films using atomic oxygen. Thin Solid Films 2015, 597 , 112-116. https://doi.org/10.1016/j.tsf.2015.11.024
- A.P. McCoy, J. Bogan, L. Walsh, C. Byrne, P. Casey, G. Hughes. The addition of aluminium to ruthenium liner layers for use as copper diffusion barriers. Applied Surface Science 2014, 307 , 677-681. https://doi.org/10.1016/j.apsusc.2014.04.097
Article Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.
Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.
The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated.