ACS Publications. Most Trusted. Most Cited. Most Read
My Activity
CONTENT TYPES

Figure 1Loading Img

In Situ Investigations into the Mechanism of Oxygen Catalysis on Ruthenium/Manganese Surfaces and the Thermodynamic Stability of Ru/Mn-Based Copper Diffusion Barrier Layers

View Author Information
School of Physical Sciences, Dublin City University, Glasnevin, Dublin 9, Ireland
*Telephone: +353-1-7008837; e-mail: [email protected]
Cite this: J. Phys. Chem. C 2013, 117, 31, 16136–16143
Publication Date (Web):July 11, 2013
https://doi.org/10.1021/jp4057658
Copyright © 2013 American Chemical Society

    Article Views

    527

    Altmetric

    -

    Citations

    LEARN ABOUT THESE METRICS
    Other access options

    Abstract

    Abstract Image

    This study shows direct experimental evidence of the catalytic activity of bimetallic ruthenium/manganese surfaces toward oxygen and determines how this activity impacts the thermodynamic stability of Ru/Mn-based copper diffusion barrier layers for advanced microelectronic devices. X-ray photoemission spectroscopy (XPS) analysis, as part of a fully in situ experimental procedure, showed the thermal dissociation of manganese monoxide (MnO) and the desorption of oxygen in the presence of Ru at 500 °C. This is in contrast with the thermal stability of MnO in the absence of Ru at temperatures up to 700 °C and suggests that the presence of Ru increases the catalytic activity of Mn surfaces by reducing the MnO dissociation energy and the oxygen desorption energy. XPS analysis showed no evidence of a change in the chemical composition of the Ru layer, consistent with previously proposed mechanisms for oxygen catalysis on bimetallic surfaces. Further studies investigated the impact of the presence of Ru on the chemical composition and thermodynamic stability of Mn–O-based copper diffusion barrier layers, which were preformed in situ in ultra high vacuum. Results from separate experiments show that the presence of Ru liner layers (∼2 nm) causes the partial dissociation of both MnO and MnSiO3 barrier layers (∼5 nm) following 500 °C thermal annealing. This result is again attributed to the catalytic activity of Ru/Mn surfaces reducing the dissociation energy of the Mn–O bond within the barrier layer region.

    Read this article

    To access this article, please review the available access options below.

    Get instant access

    Purchase Access

    Read this article for 48 hours. Check out below using your ACS ID or as a guest.

    Recommended

    Access through Your Institution

    You may have access to this article through your institution.

    Your institution does not have access to this content. You can change your affiliated institution below.

    Cited By

    This article is cited by 7 publications.

    1. Kirak Son, Youn-Hye Kim, Soo-Hyun Kim, Young-Bae Park. Interfacial adhesion energies of Ru–Mn direct plateable diffusion barriers prepared by atomic layer deposition for advanced Cu interconnects. Journal of Materials Science: Materials in Electronics 2021, 32 (15) , 20559-20569. https://doi.org/10.1007/s10854-021-06567-1
    2. Renata Lippi, Campbell J. Coghlan, Shaun C. Howard, Christopher D. Easton, Qinfen Gu, Jim Patel, Christopher J. Sumby, Danielle F. Kennedy, Christian J. Doonan. In Situ MOF-Templating of Rh Nanocatalysts under Reducing Conditions. Australian Journal of Chemistry 2020, 73 (12) , 1271. https://doi.org/10.1071/CH20193
    3. Junting Liu, Leilei Li, Zhennan Liu, Wanli Wu, Yujian Wang, Jie Xu, Feng Gao. Effect of different MnO2 phases (β-, γ-, and ε-) on the microstructure and piezoelectric properties of Pb(Zr1/2Ti1/2)O3–Pb(Zn1/3Nb2/3)O3–Pb(Ni1/3Nb2/3)O3 ceramics for energy harvesting. Journal of Materials Science: Materials in Electronics 2019, 30 (24) , 21297-21304. https://doi.org/10.1007/s10854-019-02504-5
    4. Jae-Hyung Park, Dong-Suk Han, Kyoung-Deok Kim, Jong-Wan Park. Effects of plasma pretreatment on the process of self-forming Cu–Mn alloy barriers for Cu interconnects. AIP Advances 2018, 8 (2) https://doi.org/10.1063/1.4993051
    5. Kangzhe Cao, Huiqiao Liu, Xiaohong Xu, Yijing Wang, Lifang Jiao. FeMnO 3 : a high-performance Li-ion battery anode material. Chemical Communications 2016, 52 (76) , 11414-11417. https://doi.org/10.1039/C6CC04891A
    6. A.P. McCoy, J. Bogan, A. Brady, G. Hughes. Oxidation of ruthenium thin films using atomic oxygen. Thin Solid Films 2015, 597 , 112-116. https://doi.org/10.1016/j.tsf.2015.11.024
    7. A.P. McCoy, J. Bogan, L. Walsh, C. Byrne, P. Casey, G. Hughes. The addition of aluminium to ruthenium liner layers for use as copper diffusion barriers. Applied Surface Science 2014, 307 , 677-681. https://doi.org/10.1016/j.apsusc.2014.04.097

    Pair your accounts.

    Export articles to Mendeley

    Get article recommendations from ACS based on references in your Mendeley library.

    Pair your accounts.

    Export articles to Mendeley

    Get article recommendations from ACS based on references in your Mendeley library.

    You’ve supercharged your research process with ACS and Mendeley!

    STEP 1:
    Click to create an ACS ID

    Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

    Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

    Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

    MENDELEY PAIRING EXPIRED
    Your Mendeley pairing has expired. Please reconnect