Lithographic Fabrication of Model Systems in Heterogeneous Catalysis and Surface Science StudiesClick to copy article linkArticle link copied!
Abstract
Lithographic technologies are applied to fabricate model systems for surface science and heterogeneous catalysis studies. An ordered metal nanocluster array fabricated on oxide substrates is also an ideal model system of supported industrial catalysts. Taking advantage of an ordered nanocluster array fabricated by electron beam lithography, the thermal and chemical stability of supported silver catalysts are examined in both oxidizing and reducing conditions. In reducing conditions, the supported silver nanoparticles are stable up to ∼700 °C. In oxidizing conditions, however, the silver nanoparticles are oxidized below 200 °C, and conglomerate to micrometer-size amorphous clusters ∼400 °C. The supported nanocluster sample can also be adapted to study reactivity of supported metal catalysts, as confirmed by measurement of ethylene hydrogenation turnover rates on platinum nanoparticle samples. Lithographic technologies can also fabricate model systems for other surface science research. A nanometer scale pattern is created on a poly(methyl methacrylate) (PMMA) surface by electron beam lithography. The sample is adapted to test a recent development in nanotribology, in which surface elastic modulus (hardness) is determined by a modified atomic force microscope. In addition, lithographically fabricated supported nanostructures are used to image the AFM tip (thereby determining the radius of curvature of the tip), which is a critical parameter for the quantification of surface mechanical properties such as elastic modulus. Finally, taking advantage of the uniform height profile of lithographically fabricated nanostructures, ion sputtering yield can be determined by the reduction of nanostructure height as a function of ion exposure.
†
Current address: Applied Materials, Inc., 3100 Bowers Av, m/s 0205, Santa Clara, California 95054.
*
Corresponding author. Fax: 510-643-9668. E-mail: [email protected].
Cited By
Smart citations by scite.ai include citation statements extracted from the full text of the citing article. The number of the statements may be higher than the number of citations provided by ACS Publications if one paper cites another multiple times or lower if scite has not yet processed some of the citing articles.
This article is cited by 61 publications.
- Georges Sitja , Séverine Le Moal , Maxence Marsault , Guido Hamm , Frédéric Leroy , and Claude R. Henry . Transition from Molecule to Solid State: Reactivity of Supported Metal Clusters. Nano Letters 2013, 13
(5)
, 1977-1982. https://doi.org/10.1021/nl304741t
- Aishwarya Sooresh, Hyeogsun Kwon, Robert Taylor, Patricia Pietrantonio, Michelle Pine, and Christie M. Sayes . Surface Functionalization of Silver Nanoparticles: Novel Applications for Insect Vector Control. ACS Applied Materials & Interfaces 2011, 3
(10)
, 3779-3787. https://doi.org/10.1021/am201167v
- Yujun Song, Prakash D. Nallathamby, Tao Huang, Hani E. Elsayed-Ali and Xiao-Hong Nancy Xu . Correlation and Characterization of Three-Dimensional Morphologically Dependent Localized Surface Plasmon Resonance Spectra of Single Silver Nanoparticles Using Dark-Field Optical Microscopy and Spectroscopy and Atomic Force Microscopy. The Journal of Physical Chemistry C 2010, 114
(1)
, 74-81. https://doi.org/10.1021/jp9083019
- Eric Charrault, Maoshuai He, Pierre Muller, Mounir Maaloum, Corinne Petit and Pierre Petit . A Facile Route to Homogeneous High Density Networks of Metal Nanoparticles. Langmuir 2009, 25
(19)
, 11285-11288. https://doi.org/10.1021/la9026915
- Eyk Schreiber, Ulrich Ziener, Achim Manzke, Alfred Plettl, Paul Ziemann and Katharina Landfester . Preparation of Narrowly Size Distributed Metal-Containing Polymer Latexes by Miniemulsion and Other Emulsion Techniques: Applications for Nanolithography. Chemistry of Materials 2009, 21
(8)
, 1750-1760. https://doi.org/10.1021/cm802796y
- F. Bulnes,, A. J. Ramirez-Pastor, and, G. Zgrablich. Scaling Behavior of Adsorption on Patchwise Bivariate Surfaces Revisited. Langmuir 2007, 23
(3)
, 1264-1269. https://doi.org/10.1021/la062491s
- Lei Ding,, Weiwei Zhou,, Haibin Chu,, Zhong Jin,, Yan Zhang, and, Yan Li. Direct Preparation and Patterning of Iron Oxide Nanoparticles via Microcontact Printing on Silicon Wafers for the Growth of Single-Walled Carbon Nanotubes. Chemistry of Materials 2006, 18
(17)
, 4109-4114. https://doi.org/10.1021/cm061122e
- Ali Javey and, Hongjie Dai. Regular Arrays of 2 nm Metal Nanoparticles for Deterministic Synthesis of Nanomaterials. Journal of the American Chemical Society 2005, 127
(34)
, 11942-11943. https://doi.org/10.1021/ja0536668
- Clemens Burda,, Xiaobo Chen,, Radha Narayanan, and, Mostafa A. El-Sayed. Chemistry and Properties of Nanocrystals of Different Shapes. Chemical Reviews 2005, 105
(4)
, 1025-1102. https://doi.org/10.1021/cr030063a
- Francisco Zaera. Outstanding Mechanistic Questions in Heterogeneous Catalysis. The Journal of Physical Chemistry B 2002, 106
(16)
, 4043-4052. https://doi.org/10.1021/jp014630e
- C. Zuppa and, M. Ciacera, , G. Zgrablich. Cooperative Sequential Adsorption of k-mers on Heterogeneous Substrates. Langmuir 1999, 15
(18)
, 5984-5989. https://doi.org/10.1021/la981338y
- F. Bulnes,, F. Nieto,, V. Pereyra, and, G. Zgrablich, , C. Uebing. Energetic Topography Effects on Surface Diffusion. Langmuir 1999, 15
(18)
, 5990-5996. https://doi.org/10.1021/la981348z
- Abubaker Hamad, Khawla S. Khashan, Aseel Hadi. Silver Nanoparticles and Silver Ions as Potential Antibacterial Agents. Journal of Inorganic and Organometallic Polymers and Materials 2020, 30
(12)
, 4811-4828. https://doi.org/10.1007/s10904-020-01744-x
- M. Novaković, M. Popović, P. Noga, D. Vaňa, Z. Rakočević. Formation of Au-Ag alloy nanoparticles in amorphous silicon using sequential ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2020, 471 , 33-41. https://doi.org/10.1016/j.nimb.2020.03.021
- A. Modrić-Šahbazović, M. Novaković, E. Schmidt, I. Gazdić, V. Đokić, D. Peruško, N. Bibić, C. Ronning, Z. Rakočević. Silicon nanostructuring by Ag ions implantation through nanosphere lithography mask. Optical Materials 2019, 88 , 508-515. https://doi.org/10.1016/j.optmat.2018.12.022
- Hua Huang, Takahiro Wada, Hiroko Ariga, Satoru Takakusagi, Kiyotaka Asakura, Yasuhiro Iwasawa. Controlling the inhomogeneity of solid catalysts at the mesoscopic scale. Chemical Physics Letters 2017, 683 , 18-21. https://doi.org/10.1016/j.cplett.2017.01.008
- Min Sung Kim, Tae Kyung Lee, Dong Hyun Lee. Directed assembly of suspended nanowires assisted by topographically patterned surfaces of n-paraffin. Macromolecular Research 2015, 23
(8)
, 770-775. https://doi.org/10.1007/s13233-015-3103-4
- M.E.R. Rodríguez, P.M. Pasinetti, F. Bulnes, A.J. Ramirez-Pastor. Effects of surface topography on the collective diffusion of interacting adsorbed particles. Physica A: Statistical Mechanics and its Applications 2015, 432 , 156-166. https://doi.org/10.1016/j.physa.2015.03.025
- Claude R. Henry. 2D-Arrays of Nanoparticles as Model Catalysts. Catalysis Letters 2015, 145
(3)
, 731-749. https://doi.org/10.1007/s10562-014-1402-6
- Wei Deng, Xingyi Wang, Feng Jiao, Kake Zhu. A platelet-like CeO2 mesocrystal enclosed by {100} facets: synthesis and catalytic properties. Journal of Nanoparticle Research 2013, 15
(10)
https://doi.org/10.1007/s11051-013-1944-3
- Uwe Burghaus. Applications of electron beam lithography in surface science and catalysis – model-nano-array catalysts. 2013, 141-171. https://doi.org/10.1039/9781849737203-00141
- Xiaoduan Tang, Yanan Yue, Xiangwen Chen, Xinwei Wang. Sub-wavelength temperature probing in near-field laser heating by particles. Optics Express 2012, 20
(13)
, 14152. https://doi.org/10.1364/OE.20.014152
- F.O. Sánchez-Varretti, G.D. García, A.J. Ramirez-Pastor. Modeling multilayer adsorption of interacting polyatomic species on heterogeneous surfaces. Physica A: Statistical Mechanics and its Applications 2012, 391
(4)
, 1158-1171. https://doi.org/10.1016/j.physa.2011.11.019
- Yevgeniy V. Kalinin, Adithya Murali, David H. Gracias. Chemistry with spatial control using particles and streams. RSC Advances 2012, 2
(26)
, 9707. https://doi.org/10.1039/c2ra20337e
- Jie Bai, Qingbiao Yang, Shan Wang, Yaoxian Li. Preparation and characterization of electrospun Ag/polyacrylonitrile composite nanofibers. Korean Journal of Chemical Engineering 2011, 28
(8)
, 1761-1763. https://doi.org/10.1007/s11814-011-0006-8
- Kiyotaka Asakura. Atomic aspects of surface chemical reactions. Catalysis Today 2010, 157
(1-4)
, 2-7. https://doi.org/10.1016/j.cattod.2010.01.024
- R.W. Lindström, Y.E. Seidel, Z. Jusys, M. Gustavsson, B. Wickman, B. Kasemo, R.J. Behm. Electrocatalysis and transport effects on nanostructured Pt/GC electrodes. Journal of Electroanalytical Chemistry 2010, 644
(2)
, 90-102. https://doi.org/10.1016/j.jelechem.2009.04.034
- Namal de Silva, Andrew Solovyov, Alexander Katz. Patterned metal polyhedra using calixarenes as organizational scaffolds: Ir4-based cluster assemblies. Dalton Transactions 2010, 39
(9)
, 2194. https://doi.org/10.1039/b922300b
- Fung Ling Yap, Sivashankar Krishnamoorthy. Fabricating 2D arrays of chemical templates for in situ synthesis of inorganic nanostructures using self-assembly based nanolithography. Journal of Materials Chemistry 2010, 20
(45)
, 10211. https://doi.org/10.1039/c0jm01901a
- S.L. Cheng, S.W. Lu, H. Chen. Interfacial reactions of 2-D periodic arrays of Ni metal dots on (001) Si. Journal of Physics and Chemistry of Solids 2008, 69
(2-3)
, 620-624. https://doi.org/10.1016/j.jpcs.2007.07.116
- Antonio J. Ramirez-Pastor, José L. Riccardo, Giorgio Zgrablich. Energetic Topography Effects. 2008, 211-236. https://doi.org/10.1016/B978-008044464-2.50014-6
- A.J. Ramirez-Pastor, F. Bulnes, M. Nazzarro, J.L. Riccardo, G. Zgrablich. Energetic Topography in Adsorption onto Heterogeneous Surfaces. Adsorption Science & Technology 2007, 25
(6)
, 365-384. https://doi.org/10.1260/026361707783908265
- S.L. Cheng, S.W. Lu, S.L. Wong, C.C. Chang, H. Chen. Fabrication of 2D ordered arrays of cobalt silicide nanodots on (001)Si substrates. Journal of Crystal Growth 2007, 300
(2)
, 473-477. https://doi.org/10.1016/j.jcrysgro.2006.12.023
- Lars Österlund, Ann W. Grant, Bengt Kasemo. Lithographic Techniques in Nanocatalysis. 2007, 269-341. https://doi.org/10.1007/978-3-540-32646-5_4
- S.L. Cheng, S.W. Lu, S.L. Wong, H. Chen. Growth of size-tunable periodic Ni silicide nanodot arrays on silicon substrates. Applied Surface Science 2006, 253
(4)
, 2071-2077. https://doi.org/10.1016/j.apsusc.2006.04.006
- M. Laurin, V. Johánek, A. W. Grant, B. Kasemo, J. Libuda, H.-J. Freund. Transient and steady state CO oxidation kinetics on nanolithographically prepared supported Pd model catalysts: Experiments and simulations. The Journal of Chemical Physics 2005, 123
(5)
https://doi.org/10.1063/1.1949167
- J. Libuda, H.-J. Freund. Molecular beam experiments on model catalysts. Surface Science Reports 2005, 57
(7-8)
, 157-298. https://doi.org/10.1016/j.surfrep.2005.03.002
- F. Bulnes, A.J. Ramirez-Pastor, G. Zgrablich. Monte Carlo Simulation of the Adsorption of Binary Gas Mixtures on Heterogeneous Surfaces. Adsorption Science & Technology 2005, 23
(2)
, 81-93. https://doi.org/10.1260/0263617054037826
- Jason P. Schmidt, Sarah E. Cross, Steven K. Buratto. Surface-enhanced Raman scattering from ordered Ag nanocluster arrays. The Journal of Chemical Physics 2004, 121
(21)
, 10657-10659. https://doi.org/10.1063/1.1799992
- Francisco Zaera. Mechanistic requirements for catalytic active sites. Journal of Physics: Condensed Matter 2004, 16
(22)
, S2299-S2310. https://doi.org/10.1088/0953-8984/16/22/032
- A.J. Ramirez-Pastor, F. Bulnes, G. Zgrablich. Adsorption of interacting particles on square, honeycomb and triangular correlated heterogeneous surfaces. Surface Science 2003, 536
(1-3)
, 97-113. https://doi.org/10.1016/S0039-6028(03)00538-7
- . References. 2003https://doi.org/10.1201/9780203011072.bmatt
- A. A. Kolmakov, D. W. Goodman. Size Effects in Catalysis by Supported Metal Clusters. 2003, 159-197. https://doi.org/10.1007/978-3-662-02606-9_7
- F. Romá, F. Bulnes, A. J. Ramirez-Pastor, G. Zgrablich. Temperature dependence of scaling laws in adsorption on bivariate surfaces. Phys. Chem. Chem. Phys. 2003, 5
(17)
, 3694-3699. https://doi.org/10.1039/B305355E
- Nathan Wade, Chris Evans, Sung‐Chan Jo, R. Graham Cooks. Silylation of an OH‐terminated self‐assembled monolayer surface through low‐energy collisions of ions: a novel route to synthesis and patterning of surfaces. Journal of Mass Spectrometry 2002, 37
(6)
, 591-602. https://doi.org/10.1002/jms.317
- M.V. Gargiulo, J.L. Sales, M. Ciacera, G. Zgrablich. Characterization of energetic topography of heterogeneous surfaces through the analysis of thermal desorption spectra. Surface Science 2002, 501
(3)
, 282-292. https://doi.org/10.1016/S0039-6028(01)01918-5
- Francisco Zaera. The surface chemistry of catalysis: new challenges ahead. Surface Science 2002, 500
(1-3)
, 947-965. https://doi.org/10.1016/S0039-6028(01)01531-X
- Xiujiang Li, Ioannis G. Kevrekidis, Michael Pollmann, Athanasios G. Papathanasiou, Harm Hinrich Rotermund. Front initiation on microdesigned composite catalysts. Chaos: An Interdisciplinary Journal of Nonlinear Science 2002, 12
(1)
, 190-203. https://doi.org/10.1063/1.1452739
- F. Bulnes, A. J. Ramirez-Pastor, G. Zgrablich. Scaling laws in adsorption on bivariate surfaces. Physical Review E 2002, 65
(3)
https://doi.org/10.1103/PhysRevE.65.031603
- S.Y. Shvartsman, E. Schütz, R. Imbihl, I.G. Kevrekidis. Dynamics of catalytic reactions on microdesigned surfaces. Catalysis Today 2001, 70
(4)
, 301-310. https://doi.org/10.1016/S0920-5861(01)00338-8
- Janpeter Wolff, Athanasios G. Papathanasiou, Ioannis G. Kevrekidis, Harm Hinrich Rotermund, Gerhard Ertl. Spatiotemporal Addressing of Surface Activity. Science 2001, 294
(5540)
, 134-137. https://doi.org/10.1126/science.1063597
- F. Bulnes, A. J. Ramirez-Pastor, G. Zgrablich. Scaling behavior in adsorption on bivariate surfaces and the determination of energetic topography. The Journal of Chemical Physics 2001, 115
(3)
, 1513-1521. https://doi.org/10.1063/1.1379737
- Michael Pollmann, Harm Rotermund, Gerhard Ertl, Xiujiang Li, Ioannis Kevrekidis. Formation of Two-Dimensional Concentration Pulses on Microdesigned Composite Catalyst Surfaces. Physical Review Letters 2001, 86
(26)
, 6038-6041. https://doi.org/10.1103/PhysRevLett.86.6038
- F. Bulnes, A.J. Ramirez-Pastor, G. Zgrablich. Power Laws in Adsorption and the Characterization of Heterogeneous Substrates. Adsorption Science & Technology 2001, 19
(3)
, 229-236. https://doi.org/10.1260/0263617011494114
- S. Takakusagi, M. Kato, Y. Sakai, K. Fukui, K. Asakura, Y. Iwasawa. Development of an X‐ray photoemission electron microscopy system with multi‐probes, and its application to surface imaging at static and dynamic states. Journal of Microscopy 2000, 200
(3)
, 240-250. https://doi.org/10.1046/j.1365-2818.2000.00775.x
- Claude R. Henry. Catalytic activity of supported nanometer-sized metal clusters. Applied Surface Science 2000, 164
(1-4)
, 252-259. https://doi.org/10.1016/S0169-4332(00)00344-5
- A.J. Ramı́rez-Pastor, D. Stacchiola, M.S. Nazzarro, J.L. Riccardo, G. Zgrablich. Adsorption of a Lennard–Jones gas on random bivariate surfaces. Surface Science 2000, 449
(1-3)
, 43-49. https://doi.org/10.1016/S0039-6028(99)01082-1
- Markus Schildenberger, Yargo Bonetti, Roel Prins. Nanostructuring surfaces by lithography: The production and use of model catalysts. 2000, 1121-1126. https://doi.org/10.1016/S0167-2991(00)80349-3
- Gerhard Ertl. Dynamics of reactions at surfaces. 2000, 1-69. https://doi.org/10.1016/S0360-0564(02)45012-2
- Robert Schlögl, Ulrich Summing, Andreas Friedrich, Dieter M. Kolb. Physikalische Chemie 1998. Nachrichten aus Chemie, Technik und Laboratorium 1999, 47
(2)
, 196-203. https://doi.org/10.1002/nadc.19990470213
- S. Johansson, K. Wong, V. P. Zhdanov, B. Kasemo. Nanofabrication of model catalysts and simulations of their reaction kinetics. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 1999, 17
(1)
, 297-302. https://doi.org/10.1116/1.581584
Article Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.
Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.
The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated.