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Large-Size Liftable Inverted-Nanobowl Sheets as Reusable Masks for Nanolithiography

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    Large-Size Liftable Inverted-Nanobowl Sheets as Reusable Masks for Nanolithiography
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    School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245
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    Nano Letters

    Cite this: Nano Lett. 2005, 5, 9, 1784–1788
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    https://doi.org/10.1021/nl051389x
    Published August 23, 2005
    Copyright © 2005 American Chemical Society
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    Abstract

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    A low-cost procedure is introduced for fabricating large-area, liftable, ordered TiO2 nanobowl sheets. The sheet is made using the template of self-assembled polystyrene spheres, followed by atomic layer deposition (ALD), ion milling, and etching. By introducing a thin organic layer between the nanobowls and the substrate, the whole sheet can be lifted-off in full size. The dimension of the holes at the bottom of the nanobowls is controlled by additional ALD; thus, the sheet has been applied as a reusable mask for producing nanodot patterns with designed sizes. This technique demonstrates a simple and economic nanolithiography approach for producing various designed patterns without using a clean room, and it has a great potential for scale-up, mass production, and commercial applications.

    Copyright © 2005 American Chemical Society

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    Nano Letters

    Cite this: Nano Lett. 2005, 5, 9, 1784–1788
    Click to copy citationCitation copied!
    https://doi.org/10.1021/nl051389x
    Published August 23, 2005
    Copyright © 2005 American Chemical Society
    Request reuse permissions

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