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Robust Graphene Membranes in a Silicon Carbide Frame

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    Robust Graphene Membranes in a Silicon Carbide Frame
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    † †Lehrstuhl für Angewandte Physik, ‡Center for Nanoanalysis and Electron Microscopy, §Lehrstuhl für Korrosion und Oberflächentechnik, ⊥Institute of Advanced Materials and Processes, ∥Lehrstuhl für Technische Physik, #Lehrstuhl für Experimentalphysik, ∇Lehrstuhl für Organische Chemie II, Universität Erlangen-Nürnberg, Germany
    ⊗ Institut für Physik, Technische Universität Chemnitz, Germany
    *Address correspondence to [email protected]
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    ACS Nano

    Cite this: ACS Nano 2013, 7, 5, 4441–4448
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    https://doi.org/10.1021/nn401037c
    Published April 15, 2013
    Copyright © 2013 American Chemical Society
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    Abstract

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    We present a fabrication process for freely suspended membranes consisting of bi- and trilayer graphene grown on silicon carbide. The procedure, involving photoelectrochemical etching, enables the simultaneous fabrication of hundreds of arbitrarily shaped membranes with an area up to 500 μm2 and a yield of around 90%. Micro-Raman and atomic force microscopy measurements confirm that the graphene layer withstands the electrochemical etching and show that the membranes are virtually unstrained. The process delivers membranes with a cleanliness suited for high-resolution transmission electron microscopy (HRTEM) at atomic scale. The membrane, and its frame, is very robust with respect to thermal cycling above 1000 °C as well as harsh acidic or alkaline treatment.

    Copyright © 2013 American Chemical Society

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    This article is cited by 15 publications.

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    2. Himadri R. Soni, Julian Gebhardt, and Andreas Görling . Reactivity of Substrate-Supported Graphene: A Case Study of Hydrogenation. The Journal of Physical Chemistry C 2018, 122 (5) , 2761-2772. https://doi.org/10.1021/acs.jpcc.7b11220
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    7. Florian Speck, Markus Ostler, Sven Besendörfer, Julia Krone, Martina Wanke, Thomas Seyller. Growth and Intercalation of Graphene on Silicon Carbide Studied by Low‐Energy Electron Microscopy. Annalen der Physik 2017, 529 (11) https://doi.org/10.1002/andp.201700046
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    14. Benjamin Butz, Christian Dolle, Florian Niekiel, Konstantin Weber, Daniel Waldmann, Heiko B. Weber, Bernd Meyer, Erdmann Spiecker. Dislocations in bilayer graphene. Nature 2014, 505 (7484) , 533-537. https://doi.org/10.1038/nature12780
    15. F Fromm, P Wehrfritz, M Hundhausen, Th Seyller. Looking behind the scenes: Raman spectroscopy of top-gated epitaxial graphene through the substrate. New Journal of Physics 2013, 15 (11) , 113006. https://doi.org/10.1088/1367-2630/15/11/113006
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    ACS Nano

    Cite this: ACS Nano 2013, 7, 5, 4441–4448
    Click to copy citationCitation copied!
    https://doi.org/10.1021/nn401037c
    Published April 15, 2013
    Copyright © 2013 American Chemical Society
    Request reuse permissions

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