Technical Note

Second-Generation Maskless Photolithography Device for Surface Micropatterning and Microfluidic Channel Fabrication

Institute of Advanced Biomedical Engineering and Science, Tokyo Women's Medical University, 8-1 Kawada-cho, Shinjuku, Tokyo 162-8666, Japan
Anal. Chem., 2008, 80 (4), pp 1323–1327
DOI: 10.1021/ac702208d
Publication Date (Web): January 23, 2008
Copyright © 2008 American Chemical Society

Abstract

We have previously reported on a maskless photolithography device for surface micropatterning and microfabrication by modifying a commercially available liquid crystal display projector. For the prototype, 10-μm resolution was achieved by downsizing the image on a 0.7-in. liquid crystal display panel to an area of 8 × 6 mm and projecting it on a fixed stage. Here, we report on a second-generation maskless photolithography device having two novel features. First, the sliding lens system with variable focal distances and exchangeable objective lenses achieves a variable resolution of 2−8 μm. Second, the synchronous control of displayed images generated by a personal computer and the movement of a XY-positioning stage allows for the fabrication of micropatterns over a larger area (over 50 × 50 mm). Here, we show examples fabricated with the two novel features.

Citation data is made available by participants in Crossref's Cited-by Linking service. For a more comprehensive list of citations to this article, users are encouraged to perform a search inSciFinder.

Explore by:

Metrics

Article Views: 950 Times
Received 26 October 2007
Published online 23 January 2008
Published in print 1 February 2008
+
Altmetric Logo Icon More Article Metrics

This website uses cookies to improve your user experience. By continuing to use the site, you are accepting our use of cookies. Read the ACS privacy policy.

CONTINUE