Adsorption on Nanopores of Different Cross Sections Made by Electron Beam Nanolithography

Adsorption on nanoporous matrices is characterized by a pronounced hysteresis loop in the adsorption isotherm, when the substrate is loaded and unloaded with adsorbate, the origin of which is a matter of immense debate in the literature. In this work, we report a study of argon adsorption at 85 K on nonconnecting nanopores with one end closed to the surrounding where the effects of different pore cross sections fabricated by electron beam lithography (EBL) are investigated. A polymethylmethacrylate (PMMA) resist is deposited on the electrodes of a sensitive quartz crystal microbalance without degradation of the resonance quality factor or the long-term and short-term stabilities of the device even at cryogenic temperatures. Four different pores’ cross sections: circular, square, rectangular, and triangular, are produced from EBL, and the isotherms for these pore shapes exhibit pronounced hysteresis loops whose adsorption and desorption branches are nearly vertical and have almost the same slopes. No difference is observed in the hysteresis loops of the isotherms for the pores with triangular and square cross sections, whereas the hysteresis loop for the pore with circular cross sections is much narrower, suggesting that they are more regular than the other pores. All of these observations suggest that the hysteresis behavior resulted mainly from microscopic geometric irregularities present in these porous matrices.