High-Efficiency Flexible Perovskite Solar Cells Enabled by an Ultrafast Room-Temperature Reactive Ion Etching ProcessClick to copy article linkArticle link copied!
- Byeong Jo KimByeong Jo KimSchool of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of KoreaDepartment of Chemistry-Ångström Laboratory, Physical Chemistry, Uppsala University, Box 523, SE 751 20 Uppsala, SwedenMore by Byeong Jo Kim
- Seung Lee KwonSeung Lee KwonSchool of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of KoreaMore by Seung Lee Kwon
- Min-cheol KimMin-cheol KimDepartment of NanoEngineering, University of California, San Diego, 9500 Gilman Drive, La Jolla, California 92093, United StatesMore by Min-cheol Kim
- Young Un JinYoung Un JinSchool of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of KoreaMore by Young Un Jin
- Dong Geon LeeDong Geon LeeSchool of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of KoreaMore by Dong Geon Lee
- Jae Bum JeonJae Bum JeonSchool of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of KoreaMore by Jae Bum Jeon
- Yeonghun YunYeonghun YunSchool of Materials Science and Engineering, Kyungpook National University, Daegu 41566, Republic of KoreaMore by Yeonghun Yun
- Mansoo ChoiMansoo ChoiDepartment of Mechanical and Aerospace Engineering, Seoul National University, Seoul 08826, Republic of KoreaGlobal Frontier Center for Multiscale Energy Systems, Seoul 151-744, Republic of KoreaMore by Mansoo Choi
- Gerrit BoschlooGerrit BoschlooDepartment of Chemistry-Ångström Laboratory, Physical Chemistry, Uppsala University, Box 523, SE 751 20 Uppsala, SwedenMore by Gerrit Boschloo
- Sangwook Lee*Sangwook Lee*E-mail: [email protected]. Phone: +82-31-290-7403. Fax: +82-31-290-7410 (H.S.J.).School of Materials Science and Engineering, Kyungpook National University, Daegu 41566, Republic of KoreaMore by Sangwook Lee
- Hyun Suk Jung*Hyun Suk Jung*E-mail: [email protected]. Phone: +82-53-950-5632 (S.L.).School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of KoreaMore by Hyun Suk Jung
Abstract

Perovskite solar cells (PSCs), which have surprisingly emerged in recent years, are now aiming at commercialization. Rapid, low-temperature, and continuous fabrication processes that can produce high-efficiency PSCs with a reduced fabrication cost and shortened energy payback time are important challenges on the way to commercialization. Herein, we report a reactive ion etching (RIE) method, which is an ultrafast room-temperature technique, to fabricate mesoporous TiO2 (mp-TiO2) as an electron transport layer for high-efficiency PSCs. Replacing the conventional high-temperature annealing process by RIE reduces the total processing time for fabricating 20 PSCs by 40%. Additionally, the RIE-processed mp-TiO2 exhibits enhanced electron extraction, whereupon the optimized RIE-mp-TiO2-based PSC exhibits a power conversion efficiency (PCE) of 19.60% without J–V hysteresis, when the devices were optimized with a TiCl4 surface treatment process. Finally, a flexible PSC employing RIE-mp-TiO2 is demonstrated with 17.29% PCE. Considering that the RIE process has been actively used in the semiconductor industry, including for the fabrication of silicon photovoltaic modules, the process developed in this work could be easily applied toward faster, simpler, and cheaper manufacturing of PSC modules.
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This article is cited by 8 publications.
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