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High-Efficiency Flexible Perovskite Solar Cells Enabled by an Ultrafast Room-Temperature Reactive Ion Etching Process
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    High-Efficiency Flexible Perovskite Solar Cells Enabled by an Ultrafast Room-Temperature Reactive Ion Etching Process
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    • Byeong Jo Kim
      Byeong Jo Kim
      School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
      Department of Chemistry-Ångström Laboratory, Physical Chemistry, Uppsala University, Box 523, SE 751 20 Uppsala, Sweden
    • Seung Lee Kwon
      Seung Lee Kwon
      School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
    • Min-cheol Kim
      Min-cheol Kim
      Department of NanoEngineering, University of California, San Diego, 9500 Gilman Drive, La Jolla, California 92093, United States
    • Young Un Jin
      Young Un Jin
      School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
      More by Young Un Jin
    • Dong Geon Lee
      Dong Geon Lee
      School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
    • Jae Bum Jeon
      Jae Bum Jeon
      School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
      More by Jae Bum Jeon
    • Yeonghun Yun
      Yeonghun Yun
      School of Materials Science and Engineering, Kyungpook National University, Daegu 41566, Republic of Korea
      More by Yeonghun Yun
    • Mansoo Choi
      Mansoo Choi
      Department of Mechanical and Aerospace Engineering, Seoul National University, Seoul 08826, Republic of Korea
      Global Frontier Center for Multiscale Energy Systems, Seoul 151-744, Republic of Korea
      More by Mansoo Choi
    • Gerrit Boschloo
      Gerrit Boschloo
      Department of Chemistry-Ångström Laboratory, Physical Chemistry, Uppsala University, Box 523, SE 751 20 Uppsala, Sweden
    • Sangwook Lee*
      Sangwook Lee
      School of Materials Science and Engineering, Kyungpook National University, Daegu 41566, Republic of Korea
      *E-mail: [email protected]. Phone: +82-31-290-7403. Fax: +82-31-290-7410 (H.S.J.).
      More by Sangwook Lee
    • Hyun Suk Jung*
      Hyun Suk Jung
      School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea
      *E-mail: [email protected]. Phone: +82-53-950-5632 (S.L.).
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    ACS Applied Materials & Interfaces

    Cite this: ACS Appl. Mater. Interfaces 2020, 12, 6, 7125–7134
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsami.9b19030
    Published January 20, 2020
    Copyright © 2020 American Chemical Society

    Abstract

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    Perovskite solar cells (PSCs), which have surprisingly emerged in recent years, are now aiming at commercialization. Rapid, low-temperature, and continuous fabrication processes that can produce high-efficiency PSCs with a reduced fabrication cost and shortened energy payback time are important challenges on the way to commercialization. Herein, we report a reactive ion etching (RIE) method, which is an ultrafast room-temperature technique, to fabricate mesoporous TiO2 (mp-TiO2) as an electron transport layer for high-efficiency PSCs. Replacing the conventional high-temperature annealing process by RIE reduces the total processing time for fabricating 20 PSCs by 40%. Additionally, the RIE-processed mp-TiO2 exhibits enhanced electron extraction, whereupon the optimized RIE-mp-TiO2-based PSC exhibits a power conversion efficiency (PCE) of 19.60% without JV hysteresis, when the devices were optimized with a TiCl4 surface treatment process. Finally, a flexible PSC employing RIE-mp-TiO2 is demonstrated with 17.29% PCE. Considering that the RIE process has been actively used in the semiconductor industry, including for the fabrication of silicon photovoltaic modules, the process developed in this work could be easily applied toward faster, simpler, and cheaper manufacturing of PSC modules.

    Copyright © 2020 American Chemical Society

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    Supporting Information

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsami.9b19030.

    • Summary of the process time by different treatments, detailed second-order fitting data of TRPL analysis, JV curve of the optimized RIE-mp-TiO2-based PSC by the active area, SSPL analysis, plan-view SEM images of RIE-mp-TiO2 with 100 W/10 min, SAED patterns, XPS spectra of C 1s from both mp-TiO2, box chart of photovoltaic parameters with various RF powers and process times, XRD and XPS data of damaged RIE-mp-TiO2, EQE data of optimized PSC, and results of reliability for large-area RIE processes (PDF)

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    This article is cited by 8 publications.

    1. Yuanji Gao, Keqing Huang, Caoyu Long, Yang Ding, Jianhui Chang, Dou Zhang, Lioz Etgar, Mingzhen Liu, Jian Zhang, Junliang Yang. Flexible Perovskite Solar Cells: From Materials and Device Architectures to Applications. ACS Energy Letters 2022, 7 (4) , 1412-1445. https://doi.org/10.1021/acsenergylett.1c02768
    2. Tomáš Homola, Jan Pospisil, Masoud Shekargoftar, Tomáš Svoboda, Matej Hvojnik, Pavol Gemeiner, Martin Weiter, Petr Dzik. Perovskite Solar Cells with Low-Cost TiO2 Mesoporous Photoanodes Prepared by Rapid Low-Temperature (70 °C) Plasma Processing. ACS Applied Energy Materials 2020, 3 (12) , 12009-12018. https://doi.org/10.1021/acsaem.0c02144
    3. Poonam Subudhi, Deepak Punetha. Progress, challenges, and perspectives on polymer substrates for emerging flexible solar cells: A holistic panoramic review. Progress in Photovoltaics: Research and Applications 2023, 31 (8) , 753-789. https://doi.org/10.1002/pip.3703
    4. Fuge You, Shiwu Chen, Tianjun Ma, Feng Xiao, Chao Chen, Hsien-Yi Hsu, Haisheng Song, Jiang Tang. Reactive Ion Etching Activating TiO 2 Substrate for Planar Heterojunction Sb 2 S 3 Solar Cells with 6.06% Efficiency. Energy Technology 2022, 10 (12) https://doi.org/10.1002/ente.202200940
    5. Yeonghun Yun, Devthade Vidyasagar, Minho Lee, Oh Yeong Gong, Jina Jung, Hyun‐Suk Jung, Dong Hoe Kim, Sangwook Lee. Intermediate Phase‐Free Process for Methylammonium Lead Iodide Thin Film for High‐Efficiency Perovskite Solar Cells. Advanced Science 2021, 8 (21) https://doi.org/10.1002/advs.202102492
    6. Chunnan Wang, Ruomei Shao, Guiqiang Wang, Jingru Zhao, Zhou Sha, Shuqing Sun. Controllable wet etching of porous anodic alumina toward highly ordered hierarchical interfaces. Surface and Coatings Technology 2021, 412 , 127016. https://doi.org/10.1016/j.surfcoat.2021.127016
    7. Snehangshu Mishra, Subrata Ghosh, Trilok Singh. Progress in Materials Development for Flexible Perovskite Solar Cells and Future Prospects. ChemSusChem 2021, 14 (2) , 512-538. https://doi.org/10.1002/cssc.202002095
    8. Devthade Vidyasagar, Jeong Woo Han, Seungtae Baek, Yeonghun Yun, Jeongcheol Yun, Hyunil Jo, Yonghan Yun, Young-Woo Heo, Sangwook Lee. Role of oxygen atmosphere on fabrication and photovoltaic properties of amorphous Sn-I-O electron transport layer. Materials Letters 2020, 273 , 127960. https://doi.org/10.1016/j.matlet.2020.127960

    ACS Applied Materials & Interfaces

    Cite this: ACS Appl. Mater. Interfaces 2020, 12, 6, 7125–7134
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsami.9b19030
    Published January 20, 2020
    Copyright © 2020 American Chemical Society

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