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A Highly Sensitive and Fast-Responding SnO2 Sensor Fabricated by Combustion Chemical Vapor Deposition
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    A Highly Sensitive and Fast-Responding SnO2 Sensor Fabricated by Combustion Chemical Vapor Deposition
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    Center for Innovative Fuel Cell and Battery Technologies, School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245
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    Chemistry of Materials

    Cite this: Chem. Mater. 2005, 17, 15, 3997–4000
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    https://doi.org/10.1021/cm050451o
    Published June 21, 2005
    Copyright © 2005 American Chemical Society

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    Highly porous and nanostructured SnO2 thin-film gas sensors with Pt interdigitated electrodes have been fabricated via a combustion chemical vapor deposition process. The SnO2 films were less than 1 μm thick and consisted of nanocrystallines smaller than 30 nm. At 300 °C, the as-prepared SnO2 gas sensor showed a sensitivity of 1075 to 500 ppm ethanol vapor, and the corresponding response time and recovery time were 31 and 8 s, respectively. The extrapolated low detection limit appears to be below 1 ppm. Consequently, the as-fabricated sensor demonstrated significant improvements over those reported in the literature. These highly sensitive, fast-responding, and low-cost SnO2 sensors could have many practical applications.

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    Cite this: Chem. Mater. 2005, 17, 15, 3997–4000
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    Published June 21, 2005
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