Phase-Selective Synthesis of Rhombohedral WS2 Multilayers by Confined-Space Hybrid Metal–Organic Chemical Vapor DepositionClick to copy article linkArticle link copied!
- Zhepeng ZhangZhepeng ZhangDepartment of Materials Science & Engineering, Stanford University, Stanford, California 94305, United StatesStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesMore by Zhepeng Zhang
- Marisa HockingMarisa HockingDepartment of Materials Science & Engineering, Stanford University, Stanford, California 94305, United StatesStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesMore by Marisa Hocking
- Zhenghan PengZhenghan PengDepartment of Materials Science & Engineering, Stanford University, Stanford, California 94305, United StatesStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesMore by Zhenghan Peng
- Mihir PendharkarMihir PendharkarDepartment of Materials Science & Engineering, Stanford University, Stanford, California 94305, United StatesStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesMore by Mihir Pendharkar
- Elijah David Solomon CourtneyElijah David Solomon CourtneyStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesDepartment of Physics, Stanford University, Stanford, California 94305, United StatesMore by Elijah David Solomon Courtney
- Jenny HuJenny HuDepartment of Applied Physics, Stanford University, Stanford, California 94305, United StatesMore by Jenny Hu
- Marc A. KastnerMarc A. KastnerStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesDepartment of Physics, Stanford University, Stanford, California 94305, United StatesDepartment of Physics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United StatesMore by Marc A. Kastner
- David Goldhaber-GordonDavid Goldhaber-GordonStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesDepartment of Physics, Stanford University, Stanford, California 94305, United StatesMore by David Goldhaber-Gordon
- Tony F. HeinzTony F. HeinzStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesDepartment of Applied Physics, Stanford University, Stanford, California 94305, United StatesDepartment of Photon Sciences, Stanford University, Stanford, California 94305, United StatesMore by Tony F. Heinz
- Andrew J. Mannix*Andrew J. Mannix*Email: [email protected]Department of Materials Science & Engineering, Stanford University, Stanford, California 94305, United StatesStanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory, Menlo Park, California 94025, United StatesMore by Andrew J. Mannix
Abstract
Rhombohedral polytype transition metal dichalcogenide (TMDC) multilayers exhibit non-centrosymmetric interlayer stacking, which yields intriguing properties such as ferroelectricity, a large second-order susceptibility coefficient χ(2), giant valley coherence, and a bulk photovoltaic effect. These properties have spurred significant interest in developing phase-selective growth methods for multilayer rhombohedral TMDC films. Here, we report a confined-space, hybrid metal–organic chemical vapor deposition method that preferentially grows 3R-WS2 multilayer films with thickness up to 130 nm. We confirm the 3R stacking structure via polarization-resolved second-harmonic generation characterization and the 3-fold symmetry revealed by anisotropic H2O2 etching. The multilayer 3R WS2 shows a dendritic morphology, which is indicative of diffusion-limited growth. Multilayer regions with large, stepped terraces enable layer-resolved evaluation of the optical properties of 3R-WS2 via Raman, photoluminescence, and differential reflectance spectroscopy. These measurements confirm the interfacial quality and suggest ferroelectric modification of the exciton energies.
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