Surface Nanostructure Fabrication by Initiated Chemical Vapor Deposition and Its Combined TechnologiesClick to copy article linkArticle link copied!
- Qing Song*Qing Song*Email: [email protected]. Tel.: + 86 18710804076.Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, ChinaMore by Qing Song
- Haijun GaoHaijun GaoStrait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, ChinaMore by Haijun Gao
- Lin ChengLin ChengStrait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, ChinaMore by Lin Cheng
- Zihan Xiao
- Deli LiDeli LiStrait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, ChinaMore by Deli Li
- Yue WangYue WangStrait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, ChinaMore by Yue Wang
- Meizhen XieMeizhen XieSchool of Food Science and Engineering, Hainan University, Haikou 570228, Hainan, ChinaMore by Meizhen Xie
- Nathan A. FullerNathan A. FullerDivision of Natural Sciences, Lyon College, Batesville, Arkansas 72501, United StatesMore by Nathan A. Fuller
- Mengfan Zhu*Mengfan Zhu*Email: [email protected]. Tel.: + 1 870 307 7212.Division of Natural Sciences, Lyon College, Batesville, Arkansas 72501, United StatesMore by Mengfan Zhu
Abstract

Initiated chemical vapor deposition (iCVD) is a versatile technique that enables the direct growth of nanostructures and surface modification of such structures. Unlike traditional CVD methods, iCVD operates under mild conditions, allowing for damage-free processing of delicate substrates. It can produce highly uniform polymer layers, with thicknesses ranging from over 15 μm to sub-10 nm, conformally coating intricate geometries. The broad range of polymer compositions achievable with iCVD offers precise control of surface chemistry. In this Viewpoint, we present iCVD’s mechanisms and the principles for controlling the composition and morphology of deposited layers. We summarize various surface nanostructures including nanodomes, nanocones, nanowrinkles, nanoparticles, and nanoporous structures that are directly fabricated using iCVD. We also demonstrate the integration of iCVD with other advanced methods, such as photo, soft, and nanoimprint lithography; template-assisted growth; and thermal CVD, to leverage the advantages of multiple methods and overcome individual limitations in nanofabrication. Through these combined strategies, we show the iCVD’s potential for creating multifunctional nanostructures with broad applications across engineering and biomedical fields.
Cited By
Smart citations by scite.ai include citation statements extracted from the full text of the citing article. The number of the statements may be higher than the number of citations provided by ACS Publications if one paper cites another multiple times or lower if scite has not yet processed some of the citing articles.
This article is cited by 3 publications.
- Qing Song, Haijun Gao, Lin Cheng, Whitney L. Mitchell, Mengfan Zhu, Yu Mao. Emerging Initiated Chemical Vapor Deposition Nanocoatings for Sustainable Food and Agriculture. Journal of Agricultural and Food Chemistry 2025, 73
(11)
, 6442-6455. https://doi.org/10.1021/acs.jafc.5c01820
- Muhammad Khan, Xiaohui Sun, Muhammad Kashif, Amir Zada, Shohreh Azizi, Ahmed H. Ragab, Mostafa A. Taher, Qumber Abbas, Khurram Shehzad. Exploration of bismuth-based nanomaterials: From fundamental concepts to innovative synthesis techniques and emerging applications. Coordination Chemistry Reviews 2025, 538 , 216687. https://doi.org/10.1016/j.ccr.2025.216687
- Meysam Heydari Gharahcheshmeh. Fabrication of Conjugated Conducting Polymers by Chemical Vapor Deposition (CVD) Method. Nanomaterials 2025, 15
(6)
, 452. https://doi.org/10.3390/nano15060452
Article Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.
Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.
The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated.