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Surface Nanostructure Fabrication by Initiated Chemical Vapor Deposition and Its Combined Technologies
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    Surface Nanostructure Fabrication by Initiated Chemical Vapor Deposition and Its Combined Technologies
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    • Qing Song*
      Qing Song
      Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
      *Email: [email protected]. Tel.: + 86 18710804076.
      More by Qing Song
    • Haijun Gao
      Haijun Gao
      Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
      More by Haijun Gao
    • Lin Cheng
      Lin Cheng
      Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
      More by Lin Cheng
    • Zihan Xiao
      Zihan Xiao
      Wuhan Marine Machinery Plant Co., Ltd., Wuhan 430084, China
      More by Zihan Xiao
    • Deli Li
      Deli Li
      Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
      More by Deli Li
    • Yue Wang
      Yue Wang
      Strait Institute of Flexible Electronics (SIFE, Future Technologies), Fujian Key Laboratory of Flexible Electronics, Fujian Normal University and Strait Laboratory of Flexible Electronics (SLoFE), Fuzhou 350117, China
      More by Yue Wang
    • Meizhen Xie
      Meizhen Xie
      School of Food Science and Engineering, Hainan University, Haikou 570228, Hainan, China
      More by Meizhen Xie
    • Nathan A. Fuller
      Nathan A. Fuller
      Division of Natural Sciences, Lyon College, Batesville, Arkansas 72501, United States
    • Mengfan Zhu*
      Mengfan Zhu
      Division of Natural Sciences, Lyon College, Batesville, Arkansas 72501, United States
      *Email: [email protected]. Tel.: + 1 870 307 7212.
      More by Mengfan Zhu
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    ACS Macro Letters

    Cite this: ACS Macro Lett. 2025, 14, 2, 214–224
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    https://doi.org/10.1021/acsmacrolett.4c00793
    Published February 3, 2025
    Copyright © 2025 American Chemical Society

    Abstract

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    Initiated chemical vapor deposition (iCVD) is a versatile technique that enables the direct growth of nanostructures and surface modification of such structures. Unlike traditional CVD methods, iCVD operates under mild conditions, allowing for damage-free processing of delicate substrates. It can produce highly uniform polymer layers, with thicknesses ranging from over 15 μm to sub-10 nm, conformally coating intricate geometries. The broad range of polymer compositions achievable with iCVD offers precise control of surface chemistry. In this Viewpoint, we present iCVD’s mechanisms and the principles for controlling the composition and morphology of deposited layers. We summarize various surface nanostructures including nanodomes, nanocones, nanowrinkles, nanoparticles, and nanoporous structures that are directly fabricated using iCVD. We also demonstrate the integration of iCVD with other advanced methods, such as photo, soft, and nanoimprint lithography; template-assisted growth; and thermal CVD, to leverage the advantages of multiple methods and overcome individual limitations in nanofabrication. Through these combined strategies, we show the iCVD’s potential for creating multifunctional nanostructures with broad applications across engineering and biomedical fields.

    Copyright © 2025 American Chemical Society

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    This article is cited by 3 publications.

    1. Qing Song, Haijun Gao, Lin Cheng, Whitney L. Mitchell, Mengfan Zhu, Yu Mao. Emerging Initiated Chemical Vapor Deposition Nanocoatings for Sustainable Food and Agriculture. Journal of Agricultural and Food Chemistry 2025, 73 (11) , 6442-6455. https://doi.org/10.1021/acs.jafc.5c01820
    2. Muhammad Khan, Xiaohui Sun, Muhammad Kashif, Amir Zada, Shohreh Azizi, Ahmed H. Ragab, Mostafa A. Taher, Qumber Abbas, Khurram Shehzad. Exploration of bismuth-based nanomaterials: From fundamental concepts to innovative synthesis techniques and emerging applications. Coordination Chemistry Reviews 2025, 538 , 216687. https://doi.org/10.1016/j.ccr.2025.216687
    3. Meysam Heydari Gharahcheshmeh. Fabrication of Conjugated Conducting Polymers by Chemical Vapor Deposition (CVD) Method. Nanomaterials 2025, 15 (6) , 452. https://doi.org/10.3390/nano15060452

    ACS Macro Letters

    Cite this: ACS Macro Lett. 2025, 14, 2, 214–224
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsmacrolett.4c00793
    Published February 3, 2025
    Copyright © 2025 American Chemical Society

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